Optimization of cantilever-based MEMS switch

Mohammadmahdi Vakilian, Maryam Mousavi, Badariah Bais, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper, RF MEMS switches were studied. One of the applications of RF MEMS switches is in the reconfigurable antenna where it is used to replace the traditional switches such as FET and PIN switches. Among the RF MEMS switches, the cantilever-based MEMS switch is the most popular for its low cost and ease of the fabrication process. The 3D builder and Thermo-Electro-Mechanical (TEM) modules of the IntelliSuite software were used for the simulation of the cantilever-based MEMS switch. The effect of materials and beam geometry of the switch on the pull in voltage and the operating frequency were discussed. The simulation results showed that there is a trade-off between the pull in voltage and the operating frequency for optimizing the cantilever-based MEMS switch.

Original languageEnglish
Title of host publication2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings
Pages168-172
Number of pages5
DOIs
Publication statusPublished - 2012
Event2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Kuala Lumpur
Duration: 19 Sep 201221 Sep 2012

Other

Other2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012
CityKuala Lumpur
Period19/9/1221/9/12

Fingerprint

MEMS
Switches
Electric potential
Field effect transistors
Antennas
Fabrication
Geometry
Costs

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Vakilian, M., Mousavi, M., Bais, B., & Yeop Majlis, B. (2012). Optimization of cantilever-based MEMS switch. In 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings (pp. 168-172). [6417116] https://doi.org/10.1109/SMElec.2012.6417116

Optimization of cantilever-based MEMS switch. / Vakilian, Mohammadmahdi; Mousavi, Maryam; Bais, Badariah; Yeop Majlis, Burhanuddin.

2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings. 2012. p. 168-172 6417116.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Vakilian, M, Mousavi, M, Bais, B & Yeop Majlis, B 2012, Optimization of cantilever-based MEMS switch. in 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings., 6417116, pp. 168-172, 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012, Kuala Lumpur, 19/9/12. https://doi.org/10.1109/SMElec.2012.6417116
Vakilian M, Mousavi M, Bais B, Yeop Majlis B. Optimization of cantilever-based MEMS switch. In 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings. 2012. p. 168-172. 6417116 https://doi.org/10.1109/SMElec.2012.6417116
Vakilian, Mohammadmahdi ; Mousavi, Maryam ; Bais, Badariah ; Yeop Majlis, Burhanuddin. / Optimization of cantilever-based MEMS switch. 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings. 2012. pp. 168-172
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