Optimization of beam length and air gap of suspended graphene NEMS switch for low pull-in voltage application

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The trend of miniaturization has led to the development of graphene nanoelectromechanical system (NEMS) switch due to high demand for low power consumption device applications. One of the important step before start the fabrication process is to model and simulate the graphene NEMS switch in order to get the optimum device dimension with low pull-in voltage applications. The present work represents simulations of suspended graphene length and air beam effects on the pull-in voltage for NEMS switch application. The analysis is done by 3D simulation using COMSOL Multiphysics software under electromechanics interface based on Finite Element Method (FEM). Comparable values with the conventional semiconductor switch of the pull-in voltage can be achieved at ratio below 10 to 0.5 value of the graphene beam length and air gap, respectively. This article is expected to estimate the operational parameter and dimension that can produce low pull-in voltage for a graphene NEMS switch operations.

Original languageEnglish
Title of host publication2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages29-32
Number of pages4
Volume2016-September
ISBN (Electronic)9781509023837
DOIs
Publication statusPublished - 21 Sep 2016
Event12th IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Bangsar, Kuala Lumpur, Malaysia
Duration: 17 Aug 201619 Aug 2016

Other

Other12th IEEE International Conference on Semiconductor Electronics, ICSE 2016
CountryMalaysia
CityBangsar, Kuala Lumpur
Period17/8/1619/8/16

Fingerprint

NEMS
Graphite
Graphene
Switches
Electric potential
Air
Semiconductor switches
Interfaces (computer)
Electric power utilization
Finite element method
Fabrication

Keywords

  • air gap
  • beam length
  • graphene NEMS switch
  • modeling and simulation
  • pull-in voltage

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Zulkefli, M. A., Mohamed, M. A., Siow, K. S., & Yeop Majlis, B. (2016). Optimization of beam length and air gap of suspended graphene NEMS switch for low pull-in voltage application. In 2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings (Vol. 2016-September, pp. 29-32). [7573583] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2016.7573583

Optimization of beam length and air gap of suspended graphene NEMS switch for low pull-in voltage application. / Zulkefli, Mohd Amir; Mohamed, Mohd Ambri; Siow, Kim Shyong; Yeop Majlis, Burhanuddin.

2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings. Vol. 2016-September Institute of Electrical and Electronics Engineers Inc., 2016. p. 29-32 7573583.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zulkefli, MA, Mohamed, MA, Siow, KS & Yeop Majlis, B 2016, Optimization of beam length and air gap of suspended graphene NEMS switch for low pull-in voltage application. in 2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings. vol. 2016-September, 7573583, Institute of Electrical and Electronics Engineers Inc., pp. 29-32, 12th IEEE International Conference on Semiconductor Electronics, ICSE 2016, Bangsar, Kuala Lumpur, Malaysia, 17/8/16. https://doi.org/10.1109/SMELEC.2016.7573583
Zulkefli MA, Mohamed MA, Siow KS, Yeop Majlis B. Optimization of beam length and air gap of suspended graphene NEMS switch for low pull-in voltage application. In 2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings. Vol. 2016-September. Institute of Electrical and Electronics Engineers Inc. 2016. p. 29-32. 7573583 https://doi.org/10.1109/SMELEC.2016.7573583
Zulkefli, Mohd Amir ; Mohamed, Mohd Ambri ; Siow, Kim Shyong ; Yeop Majlis, Burhanuddin. / Optimization of beam length and air gap of suspended graphene NEMS switch for low pull-in voltage application. 2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings. Vol. 2016-September Institute of Electrical and Electronics Engineers Inc., 2016. pp. 29-32
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