Optimisation of pattern transfer in fabrication of GFET for biosensing applications

Reena Sri Selvarajan, Azrul Azlan Hamzah, Siti Aisyah Zawawi, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents optimized pattern transfer technique for fabrication of GFET by using a conventional microfabrication technique. Although there are many advanced methods are available to produce nanostructures such as ion-beam lithography (IBL), electron beam lithography (EBL), nano-imprint lithography and focused ion beam milling, these techniques often requires high maintenance costs, time and very complicated processes compared to conventional photolithography. This conventional technique is good option to pattern feature size more than 1 micron. In this work, microgap design from chrome mask are transferred on silicon wafer via conventional photolithography. The final stage of fabrication which is developing technique is optimized to the pattern the desired dimension of electrodes. Therefore, developing time is carefully monitored; drawbacks and optimized techniques are reported in this work.

Original languageEnglish
Title of host publication2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages156-159
Number of pages4
Volume2018-August
ISBN (Electronic)9781538652831
DOIs
Publication statusPublished - 3 Oct 2018
Event13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Kuala Lumpur, Malaysia
Duration: 15 Aug 201817 Aug 2018

Other

Other13th IEEE International Conference on Semiconductor Electronics, ICSE 2018
CountryMalaysia
CityKuala Lumpur
Period15/8/1817/8/18

Fingerprint

Photolithography
Ion beam lithography
Fabrication
Electron beam lithography
Microfabrication
Focused ion beams
Silicon wafers
Lithography
Masks
Nanostructures
Electrodes
Costs

Keywords

  • biosensors
  • developing time
  • electrodes
  • GFET
  • pattern transfer
  • photolithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Selvarajan, R. S., Hamzah, A. A., Zawawi, S. A., & Yeop Majlis, B. (2018). Optimisation of pattern transfer in fabrication of GFET for biosensing applications. In 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings (Vol. 2018-August, pp. 156-159). [8481332] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2018.8481332

Optimisation of pattern transfer in fabrication of GFET for biosensing applications. / Selvarajan, Reena Sri; Hamzah, Azrul Azlan; Zawawi, Siti Aisyah; Yeop Majlis, Burhanuddin.

2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August Institute of Electrical and Electronics Engineers Inc., 2018. p. 156-159 8481332.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Selvarajan, RS, Hamzah, AA, Zawawi, SA & Yeop Majlis, B 2018, Optimisation of pattern transfer in fabrication of GFET for biosensing applications. in 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. vol. 2018-August, 8481332, Institute of Electrical and Electronics Engineers Inc., pp. 156-159, 13th IEEE International Conference on Semiconductor Electronics, ICSE 2018, Kuala Lumpur, Malaysia, 15/8/18. https://doi.org/10.1109/SMELEC.2018.8481332
Selvarajan RS, Hamzah AA, Zawawi SA, Yeop Majlis B. Optimisation of pattern transfer in fabrication of GFET for biosensing applications. In 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August. Institute of Electrical and Electronics Engineers Inc. 2018. p. 156-159. 8481332 https://doi.org/10.1109/SMELEC.2018.8481332
Selvarajan, Reena Sri ; Hamzah, Azrul Azlan ; Zawawi, Siti Aisyah ; Yeop Majlis, Burhanuddin. / Optimisation of pattern transfer in fabrication of GFET for biosensing applications. 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August Institute of Electrical and Electronics Engineers Inc., 2018. pp. 156-159
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