Non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning

Ahmad Alabqari Ma Radzi, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

This paper presents the design and simulation of non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning. The accelerometers were designed with critical damping for 10 g range, mechanical sensitivity of 0.012 μm/g and thickness of 40 μm which is compatible with bulk micromachining process requirements. Simulations were carried out using IntelliSuite 7.2. Results show that the open loop accelerometer with mechanical spring of 52.3 N/m could be tuned bv negative electrostatic spring using 10 V, 7.5 V and 5V to produce -22 N/m, -12.5 N/m and -5.6 N/m respectively with 12 pairs of electrostatic finger with 1.8 μm gap, and capacitance sensitivity is increased from 20 fF/g to 40 fF/g while the dynamic range decreased to 5.8 g. The designed force-balanced accelerometer has capacitance sensitivity of 10.67 fF/g, mechanical spring of 62.2 N/m and uses 8 pairs of electrostatic finger to produce -17.7 N/m, -9.9 N/m and -4.4 N/m respectively using 10 V, 7.5 V and 5 V. Hence, the dynamic range could be tuned down from 17 g to 14 g and capacitance sensitivity increased to 12 fF/g. The fabricated devices are also shown in this paper. The designed accelerometer with electrostatic spring tuning therefore enable us to tune to the suitable spesifications with the needed g measurement.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages4-8
Number of pages5
DOIs
Publication statusPublished - 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur
Duration: 29 Nov 20061 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CityKuala Lumpur
Period29/11/061/12/06

Fingerprint

Accelerometers
MEMS
Electrostatics
Tuning
Capacitance
Micromachining
Damping

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ma Radzi, A. A., & Yeop Majlis, B. (2006). Non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 4-8). [4266559] https://doi.org/10.1109/SMELEC.2006.381009

Non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning. / Ma Radzi, Ahmad Alabqari; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 4-8 4266559.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ma Radzi, AA & Yeop Majlis, B 2006, Non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4266559, pp. 4-8, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381009
Ma Radzi AA, Yeop Majlis B. Non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 4-8. 4266559 https://doi.org/10.1109/SMELEC.2006.381009
Ma Radzi, Ahmad Alabqari ; Yeop Majlis, Burhanuddin. / Non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. pp. 4-8
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