Ni80Fe20 V-shaped magnetic core for high performance MEMS sensors and actuators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Development of integrated ferromagnetic materials structure as magnetic core is crucial for high performance MEMS sensors and actuators. A core structure is able to improve the magnetic flux linkage and concentrate the magnetic flux density in the magnetic device resulting high magnetic field generation. Previous research has utilized various ferromagnetic materials of different structures embedded into the silicon substrate as MEMS magnetic core. This paper presents fabrication of V-shaped magnetic core by anisotropic wet etching of 30 percent potassium hydroxide (KOH) at 75 oC to produce V-shaped silicon cavity structure. Filling process of Permalloy (Ni 80Fe20) into the cavity is done by DC electroplating technique. Low current density of 10 mA/cm2 is used to electrodeposit Ni80Fe20 magnetic film in this study. Saccharin addition into the electrolyte composition produced a bright and crack free structure as internal stress in the electrodeposited film is reduced. This effect is essential to have good magnetic properties of the magnetic core. Thicker structure of electroplated Ni80Fe20 is observed at the sharp edges of the V-shaped cavity tip. The reason of this effect to happen is because high current flux density occurrence at those edges. From this work, fabrication of V-shaped Ni80Fe20 magnetic core has been successfully demonstrated. This magnetic core is expected to give superior magnetic performance for on chip MEMS device applications.

Original languageEnglish
Title of host publicationProceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics
Pages66-69
Number of pages4
DOIs
Publication statusPublished - 2013
Event2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013 - Langkawi
Duration: 25 Sep 201327 Sep 2013

Other

Other2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013
CityLangkawi
Period25/9/1327/9/13

Fingerprint

Magnetic cores
MEMS
Actuators
Sensors
Ferromagnetic materials
Magnetic flux
Magnetic devices
Magnetic films
Fabrication
Anisotropic etching
Potassium hydroxide
Silicon
Wet etching
Electroplating
Residual stresses
Magnetic properties
Current density
Electrolytes
Magnetic fields
Fluxes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Abidin, U., Yeop Majlis, B., & Yunas, J. (2013). Ni80Fe20 V-shaped magnetic core for high performance MEMS sensors and actuators. In Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics (pp. 66-69). [6706474] https://doi.org/10.1109/RSM.2013.6706474

Ni80Fe20 V-shaped magnetic core for high performance MEMS sensors and actuators. / Abidin, Ummikalsom; Yeop Majlis, Burhanuddin; Yunas, Jumril.

Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. p. 66-69 6706474.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abidin, U, Yeop Majlis, B & Yunas, J 2013, Ni80Fe20 V-shaped magnetic core for high performance MEMS sensors and actuators. in Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics., 6706474, pp. 66-69, 2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013, Langkawi, 25/9/13. https://doi.org/10.1109/RSM.2013.6706474
Abidin U, Yeop Majlis B, Yunas J. Ni80Fe20 V-shaped magnetic core for high performance MEMS sensors and actuators. In Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. p. 66-69. 6706474 https://doi.org/10.1109/RSM.2013.6706474
Abidin, Ummikalsom ; Yeop Majlis, Burhanuddin ; Yunas, Jumril. / Ni80Fe20 V-shaped magnetic core for high performance MEMS sensors and actuators. Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. pp. 66-69
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