Nanoscopic surface modification by slow ion bombardment

I. C. Gebeshuber, S. Cernusca, F. Aumayr, H. P. Winter

Research output: Contribution to journalArticle

51 Citations (Scopus)

Abstract

We present systematic scanning tunneling microscopy (STM)/atomic-force microscopic (AFM) investigations on nanoscopic defect production at atomically clean surfaces of SiO2, Al2O3 and highly oriented pyrolytic graphite (HOPG) after bombardment by slow (impact energy≤1.2keV) singly and multiply charged ions under strict ultra-high vacuum (UHV) conditions. Combined STM and AFM studies show that on HOPG only "electronic" but no visible topographic defects are created by such ion bombardment. On the monocrystalline insulator surfaces, well-defined topographic features of typically nm extensions are produced ("potential sputtering"). For Al2O3 and HOPG, a clear dependence of the defect size on the projectile ion charge is demonstrated. These results are discussed in view to possible new nanoscopic surface structuring and modification methods for which the kinetic projectile energy plays a minor role only.

Original languageEnglish
Pages (from-to)27-34
Number of pages8
JournalInternational Journal of Mass Spectrometry
Volume229
Issue number1-2
DOIs
Publication statusPublished - 1 Sep 2003
Externally publishedYes

Fingerprint

Graphite
pyrolytic graphite
Ion bombardment
Heavy ions
Surface treatment
bombardment
Scanning tunneling microscopy
Projectiles
Defects
scanning tunneling microscopy
projectiles
defects
Ions
ions
ion charge
Ultrahigh vacuum
ultrahigh vacuum
Sputtering
sputtering
insulators

Keywords

  • Ion-surface interaction
  • Multicharged ions
  • Potential sputtering
  • Surface defects

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Spectroscopy

Cite this

Nanoscopic surface modification by slow ion bombardment. / Gebeshuber, I. C.; Cernusca, S.; Aumayr, F.; Winter, H. P.

In: International Journal of Mass Spectrometry, Vol. 229, No. 1-2, 01.09.2003, p. 27-34.

Research output: Contribution to journalArticle

Gebeshuber, I. C. ; Cernusca, S. ; Aumayr, F. ; Winter, H. P. / Nanoscopic surface modification by slow ion bombardment. In: International Journal of Mass Spectrometry. 2003 ; Vol. 229, No. 1-2. pp. 27-34.
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