Nanoindentation of cubic silicon carbide on silicon film

Siti Aisyah Zawawi, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis, Faisal Mohd-Yasin

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this work, mechanical properties of an epitaxial silicon carbide-on-silicon (3C-SiC-on-Si) sample were extracted using a Micro Materials Nanotest® indentation system. Maximum load, penetration depth and loading rate were set at 25 mN, 550 nm and 5 mN s-1, respectively. We first plot the load-depth curve of 3C-SiC film and Si substrate. Then, we find the maximum values of hardness, tensile modulus, shear strength, shear modulus and tensile stress of 3C-SiC film. The obtained data provide evidence of the suitability of this film to be applied as an electroacoustic transducer.

Original languageEnglish
Article number051006
JournalJapanese Journal of Applied Physics
Volume58
Issue number5
DOIs
Publication statusPublished - 1 Jan 2019

Fingerprint

Nanoindentation
silicon films
nanoindentation
Silicon carbide
silicon carbides
Silicon
Electroacoustic transducers
electroacoustic transducers
Elastic moduli
loading rate
shear strength
tensile stress
indentation
Indentation
Tensile stress
Shear strength
hardness
penetration
plots
Hardness

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Nanoindentation of cubic silicon carbide on silicon film. / Zawawi, Siti Aisyah; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin; Mohd-Yasin, Faisal.

In: Japanese Journal of Applied Physics, Vol. 58, No. 5, 051006, 01.01.2019.

Research output: Contribution to journalArticle

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