Nanocrystalline Sr1-xBaxBi4Ti4O 15 thin films for piezoelectric pressure sensor

Nor Azlian Abdul Manaf, Muhamad Mat Salleh, Muhammad Yahaya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the fabrication of nanocrystalline Strontium Barium Bismuth Titanate Sr1-xBaxBi4Ti 4O15 (SBBT) thin films for piezoelectric pressure sensors. The SBBT films and capacitance devices with structure of Al/TiO 2/SBBT/TiO2/RuO2/SiO2/Si were fabricated using sol-gel technique. Different nanostructures of the films were prepared with un-annealed condition as well as after annealing at three temperatures; 400, 500 and 600oC, in air for 2 minutes. The nanostructure of SBBT thin films have been systematically studied by XRD, AFM, SEM and dielectric constant. For the sensor device measurement, the SBBT thin film pressure sensors were tested by pneumatic loading method at pressure range between 0 to 450 kPa. It was found that the sensing properties of the films were affected by the nanostructure of the films. It was shown that there was a linear relationship between the crystallization, grains size and dielectric properties with the sensing response of the film towards pressure. The film with higher crystallization, grains size and dielectric properties demonstrates better sensitivity and repeatability compared to others. The correlation between nanostructure of the SBBT films and the piezoelectric pressure sensing properties will be discussed.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6423
DOIs
Publication statusPublished - 2007
EventInternational Conference on Smart Materials and Nanotechnology in Engineering - Harbin
Duration: 1 Jul 20074 Jul 2007

Other

OtherInternational Conference on Smart Materials and Nanotechnology in Engineering
CityHarbin
Period1/7/074/7/07

Fingerprint

Pressure sensors
pressure sensors
Thin films
thin films
Nanostructures
Dielectric properties
dielectric properties
Crystallization
grain size
crystallization
pneumatics
Strontium
Barium
Bismuth
strontium
Pneumatics
bismuth
barium
Sol-gels
Permittivity

Keywords

  • Nanocrystalline thin films
  • Piezoelectric pressure sensor
  • Sol-gel
  • Strontium barium bismuth titanate

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Abdul Manaf, N. A., Mat Salleh, M., & Yahaya, M. (2007). Nanocrystalline Sr1-xBaxBi4Ti4O 15 thin films for piezoelectric pressure sensor. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6423). [64230A] https://doi.org/10.1117/12.779213

Nanocrystalline Sr1-xBaxBi4Ti4O 15 thin films for piezoelectric pressure sensor. / Abdul Manaf, Nor Azlian; Mat Salleh, Muhamad; Yahaya, Muhammad.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6423 2007. 64230A.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abdul Manaf, NA, Mat Salleh, M & Yahaya, M 2007, Nanocrystalline Sr1-xBaxBi4Ti4O 15 thin films for piezoelectric pressure sensor. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 6423, 64230A, International Conference on Smart Materials and Nanotechnology in Engineering, Harbin, 1/7/07. https://doi.org/10.1117/12.779213
Abdul Manaf NA, Mat Salleh M, Yahaya M. Nanocrystalline Sr1-xBaxBi4Ti4O 15 thin films for piezoelectric pressure sensor. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6423. 2007. 64230A https://doi.org/10.1117/12.779213
Abdul Manaf, Nor Azlian ; Mat Salleh, Muhamad ; Yahaya, Muhammad. / Nanocrystalline Sr1-xBaxBi4Ti4O 15 thin films for piezoelectric pressure sensor. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6423 2007.
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