Nanocrystalline Bi 4Ti 3O 12 thin film for pressure sensor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Nanocrystalline Bi 4Ti 3O 12 (BTO) thin film pressure sensor was fabricated by sol gel method. The multiple Bi-Ti-O layers were spin coated over the TiO 2 buffered Si / SiO 2 / RuO 2 substrate, followed by heating of each layer at 300°C for 15 mins. The nanocrystalline Bi 4Ti 3O 12 film was formed after the sample was rapid thermal annealed at 450°C in air for 60 s. The scanning electron microscope result showed that the film exhibited crack free, fine and uniform grain structure, where the grain size obtained was around 10 to 15 nm. For the sensor response measurement, Al film was deposited as top electrode and the sensor tested by pneumatic loading method The nanocrystalline Bi 4Ti 3O 12( BTO) thin film demonstrated good repeatability for the pressure sensing. The sensor achieved a linear characteristic response between 17.5 psi and 65 psi with sensitivity of 0.3 mV / psi.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsC. Cane, J.-C. Chiao, F.V. Verdu
Pages380-388
Number of pages9
Volume5836
DOIs
Publication statusPublished - 2005
EventSmart Sensors, Actuators, and MEMS II - Seville, Spain
Duration: 9 May 200511 May 2005

Other

OtherSmart Sensors, Actuators, and MEMS II
CountrySpain
CitySeville
Period9/5/0511/5/05

Fingerprint

Pressure sensors
pressure sensors
Thin films
sensors
Sensors
thin films
pneumatics
Crystal microstructure
Pneumatics
Sol-gel process
Electron microscopes
cracks
electron microscopes
grain size
gels
Cracks
Scanning
Heating
Electrodes
heating

Keywords

  • B Ti O thin film
  • Nanocrystalline
  • Pressure sensor
  • Sol gel

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Chong, C. W., Yahaya, M., & Mat Salleh, M. (2005). Nanocrystalline Bi 4Ti 3O 12 thin film for pressure sensor In C. Cane, J-C. Chiao, & F. V. Verdu (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5836, pp. 380-388). [42] https://doi.org/10.1117/12.608444

Nanocrystalline Bi 4Ti 3O 12 thin film for pressure sensor . / Chong, Cheong Wei; Yahaya, Muhammad; Mat Salleh, Muhamad.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / C. Cane; J.-C. Chiao; F.V. Verdu. Vol. 5836 2005. p. 380-388 42.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chong, CW, Yahaya, M & Mat Salleh, M 2005, Nanocrystalline Bi 4Ti 3O 12 thin film for pressure sensor in C Cane, J-C Chiao & FV Verdu (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5836, 42, pp. 380-388, Smart Sensors, Actuators, and MEMS II, Seville, Spain, 9/5/05. https://doi.org/10.1117/12.608444
Chong CW, Yahaya M, Mat Salleh M. Nanocrystalline Bi 4Ti 3O 12 thin film for pressure sensor In Cane C, Chiao J-C, Verdu FV, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5836. 2005. p. 380-388. 42 https://doi.org/10.1117/12.608444
Chong, Cheong Wei ; Yahaya, Muhammad ; Mat Salleh, Muhamad. / Nanocrystalline Bi 4Ti 3O 12 thin film for pressure sensor Proceedings of SPIE - The International Society for Optical Engineering. editor / C. Cane ; J.-C. Chiao ; F.V. Verdu. Vol. 5836 2005. pp. 380-388
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