Modeling of diaphragms for micromachined condenser microphones

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

We present and compare the different kinds of diaphragms for micromachined condenser microphones. The aim is to develop the microphones with high sensitivity. For micromachining diaphragm, there is significant internal (residual) stress, which strongly decreases the mechanical sensitivity of diaphragm. An analysis was performed using the MATLAB software. According to our calculations, a corrugated diaphragm can greatly increase the mechanical sensitivity of the microphone diaphragms due to the reduction of the initial stress effect without changing the process conditions. A planar diaphragm is more rigid than a corrugated diaphragm at both small and large deflections (or pressures) when both diaphragms have same level of initial stress. Flat diaphragms show a nonlinear relation between the deflection and the applied pressure. The nonlinearity is caused by stress due to stretching of the diaphragm. It has been shown that corrugated diaphragms have a larger linear range than flat diaphragms, because of the achieved reduction of the initial stress in the diaphragm.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages15-21
Number of pages7
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Microphones
Diaphragms
Residual stresses
Micromachining
MATLAB
Stretching

Keywords

  • Condenser microphone
  • Flat and corrugated diaphragms
  • Initial stress
  • MEMS

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Ganji, B. A., & Yeop Majlis, B. (2004). Modeling of diaphragms for micromachined condenser microphones. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 15-21). [1620829]

Modeling of diaphragms for micromachined condenser microphones. / Ganji, Bahram Azizollah; Yeop Majlis, Burhanuddin.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 15-21 1620829.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ganji, BA & Yeop Majlis, B 2004, Modeling of diaphragms for micromachined condenser microphones. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620829, pp. 15-21, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Ganji BA, Yeop Majlis B. Modeling of diaphragms for micromachined condenser microphones. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 15-21. 1620829
Ganji, Bahram Azizollah ; Yeop Majlis, Burhanuddin. / Modeling of diaphragms for micromachined condenser microphones. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 15-21
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