Microstructural characterization of Au-In thin film deposited by electron beam evaporation

Research output: Contribution to journalArticle

Abstract

The microstructure and phase formation of Au-In thin film deposited by e-beam evaporation technique has been studied. Single crystals of rocksalt were used as the substrates. The chamber pressure during deposition was about 2.5 × 10-5 torr and substrate temperature was 35°C. Three types of samples were prepared namely Au, In and Au-In thin films. Microstructure and chemical composition of these thin films were characterized by transmission electron microscopy (TEM) and X-ray photoelectron spectrometer (XPS) respectively. TEM micrograph reveals island structures for both Au and In thin film on the rocksalt substrate, with the In island size distribution is about 9-30 nm compared to Au island in the range of 3-10 nm. The growth of islands instead of smooth film indicates that Au and In thin films follow the Volmer-Weber growth mode. However, island structures were not present on Au-In thin films which most probably follow the Frank van de Merwe growth mode. XPS analysis indicates intermetallic compound was not present in the Au-In thin film suggesting that diffusion process in the interface of Au and In films is minimal.

Original languageEnglish
Pages (from-to)91-94
Number of pages4
JournalSains Malaysiana
Volume38
Issue number1
Publication statusPublished - Feb 2009

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evaporation
electron beams
thin films
photoelectrons
spectrometers
transmission electron microscopy
microstructure
pressure chambers
intermetallics
chemical composition
x rays
single crystals
temperature

Keywords

  • Au-In thin film
  • E-beam evaporation
  • Microstructure
  • TEM
  • XPS

ASJC Scopus subject areas

  • General

Cite this

Microstructural characterization of Au-In thin film deposited by electron beam evaporation. / Norliza, Ismail; Abdul Hamid, Muhammad Azmi; Jalar @ Jalil, Azman.

In: Sains Malaysiana, Vol. 38, No. 1, 02.2009, p. 91-94.

Research output: Contribution to journalArticle

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