Microfabrication of Si<inf>3</inf>N<inf>4</inf>-polyimide membrane for thermo-pneumatic actuator

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Abstract

Purpose The purpose of this paper is to discuss the fabrication technology and test of thermo-pneumatic actuator utilizing Si3N4-polyimide thin film membrane. Thin film polyimide membrane capped with Si3N4 thin layer is used as actuator membrane which is able to deform through thermal forces inside an isolated chamber. The fabricated membrane will be suitable for thermo-pneumatic-based membrane actuation for lab-on-chip application.Design/methodology/approach The actuator device consisting of a micro-heater, a Si-based micro-chamber and a heat-sensitive square-shaped membrane is fabricated using surface and bulk-micromachining process, with an additional adhesive bonding process. The polyimide membranes capped with a thin silicon nitride layer that is fabricated by using etch stop technique and spin coating. Findings The deformation property of the membrane depend on the volumetric expansion of air particles in the heat chamber as a result of temperature increase generated from the micro-heater inside the chamber. Preliminary testing showed that the fabricated micro-heater has the capability to generate heat in the chamber with a temperature increase of 18.8 C/min. Analysis on membrane deflection against temperature increase showed that heat-sensitive thin polyimide membrane can perform the deflection up to 65 μm for a temperature increase of 57C. Originality/value The dual layer polyimide capped with Si<inf>3</inf>N<inf>4</inf> was used as the membrane material. The nitride layer allowed the polyimide membrane for working at extreme heat condition. The process technique is simple implementing standard micro-electro-mechanical systems process.

Original languageEnglish
Pages (from-to)18-24
Number of pages7
JournalMicroelectronics International
Volume32
Issue number1
DOIs
Publication statusPublished - 5 Jan 2015

Fingerprint

Pneumatic actuators
pneumatics
Microfabrication
polyimides
Polyimides
actuators
membranes
Membranes
chambers
heat
heaters
silicon nitride
deflection
Actuators
adhesive bonding
Thin films
Temperature
temperature
Micromachining
Spin coating

Keywords

  • MEMS fabrication
  • Micro-electro-mechanical systems (MEMS)
  • Si<inf>3</inf>N<inf>4</inf>-polyimide membrane, Thermo pneumatic actuator

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

Cite this

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title = "Microfabrication of Si3N4-polyimide membrane for thermo-pneumatic actuator",
abstract = "Purpose The purpose of this paper is to discuss the fabrication technology and test of thermo-pneumatic actuator utilizing Si3N4-polyimide thin film membrane. Thin film polyimide membrane capped with Si3N4 thin layer is used as actuator membrane which is able to deform through thermal forces inside an isolated chamber. The fabricated membrane will be suitable for thermo-pneumatic-based membrane actuation for lab-on-chip application.Design/methodology/approach The actuator device consisting of a micro-heater, a Si-based micro-chamber and a heat-sensitive square-shaped membrane is fabricated using surface and bulk-micromachining process, with an additional adhesive bonding process. The polyimide membranes capped with a thin silicon nitride layer that is fabricated by using etch stop technique and spin coating. Findings The deformation property of the membrane depend on the volumetric expansion of air particles in the heat chamber as a result of temperature increase generated from the micro-heater inside the chamber. Preliminary testing showed that the fabricated micro-heater has the capability to generate heat in the chamber with a temperature increase of 18.8 C/min. Analysis on membrane deflection against temperature increase showed that heat-sensitive thin polyimide membrane can perform the deflection up to 65 μm for a temperature increase of 57C. Originality/value The dual layer polyimide capped with Si3N4 was used as the membrane material. The nitride layer allowed the polyimide membrane for working at extreme heat condition. The process technique is simple implementing standard micro-electro-mechanical systems process.",
keywords = "MEMS fabrication, Micro-electro-mechanical systems (MEMS), Si<inf>3</inf>N<inf>4</inf>-polyimide membrane, Thermo pneumatic actuator",
author = "Hamid, {Norihan Abdul} and Jumril Yunas and {Yeop Majlis}, Burhanuddin and Hamzah, {Azrul Azlan} and Badariah Bais",
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language = "English",
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AU - Hamid, Norihan Abdul

AU - Yunas, Jumril

AU - Yeop Majlis, Burhanuddin

AU - Hamzah, Azrul Azlan

AU - Bais, Badariah

PY - 2015/1/5

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N2 - Purpose The purpose of this paper is to discuss the fabrication technology and test of thermo-pneumatic actuator utilizing Si3N4-polyimide thin film membrane. Thin film polyimide membrane capped with Si3N4 thin layer is used as actuator membrane which is able to deform through thermal forces inside an isolated chamber. The fabricated membrane will be suitable for thermo-pneumatic-based membrane actuation for lab-on-chip application.Design/methodology/approach The actuator device consisting of a micro-heater, a Si-based micro-chamber and a heat-sensitive square-shaped membrane is fabricated using surface and bulk-micromachining process, with an additional adhesive bonding process. The polyimide membranes capped with a thin silicon nitride layer that is fabricated by using etch stop technique and spin coating. Findings The deformation property of the membrane depend on the volumetric expansion of air particles in the heat chamber as a result of temperature increase generated from the micro-heater inside the chamber. Preliminary testing showed that the fabricated micro-heater has the capability to generate heat in the chamber with a temperature increase of 18.8 C/min. Analysis on membrane deflection against temperature increase showed that heat-sensitive thin polyimide membrane can perform the deflection up to 65 μm for a temperature increase of 57C. Originality/value The dual layer polyimide capped with Si3N4 was used as the membrane material. The nitride layer allowed the polyimide membrane for working at extreme heat condition. The process technique is simple implementing standard micro-electro-mechanical systems process.

AB - Purpose The purpose of this paper is to discuss the fabrication technology and test of thermo-pneumatic actuator utilizing Si3N4-polyimide thin film membrane. Thin film polyimide membrane capped with Si3N4 thin layer is used as actuator membrane which is able to deform through thermal forces inside an isolated chamber. The fabricated membrane will be suitable for thermo-pneumatic-based membrane actuation for lab-on-chip application.Design/methodology/approach The actuator device consisting of a micro-heater, a Si-based micro-chamber and a heat-sensitive square-shaped membrane is fabricated using surface and bulk-micromachining process, with an additional adhesive bonding process. The polyimide membranes capped with a thin silicon nitride layer that is fabricated by using etch stop technique and spin coating. Findings The deformation property of the membrane depend on the volumetric expansion of air particles in the heat chamber as a result of temperature increase generated from the micro-heater inside the chamber. Preliminary testing showed that the fabricated micro-heater has the capability to generate heat in the chamber with a temperature increase of 18.8 C/min. Analysis on membrane deflection against temperature increase showed that heat-sensitive thin polyimide membrane can perform the deflection up to 65 μm for a temperature increase of 57C. Originality/value The dual layer polyimide capped with Si3N4 was used as the membrane material. The nitride layer allowed the polyimide membrane for working at extreme heat condition. The process technique is simple implementing standard micro-electro-mechanical systems process.

KW - MEMS fabrication

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KW - Si<inf>3</inf>N<inf>4</inf>-polyimide membrane, Thermo pneumatic actuator

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