Microfabrication of sandwich micro-transformers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new planar micro-transformer having sandwich spiral coil structure is fabricated using MEMS micro-fabrication technique. Stack interwinding coil is designed to achieve high coupling and higher winding number at relatively small coil area. In this work, stack sandwich interwinding coil structure is fabricated by bonding the substrates of the coil at connection pads using conductive epoxy material. This method replaces the use of conventional via connections that cause the most problem of current conductance in planar structures. The inductance of fabricated coil are measured at wide range of operating frequency using cascade GSG probe. The results show that the proposed technique is an alternative way in fabricating a simple and cost effective 3-dimensional structure of stack micro-transformer.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages1836-1840
Number of pages5
Volume314-316
DOIs
Publication statusPublished - 2011
Event2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011 - Guangzhou
Duration: 16 Sep 201118 Sep 2011

Publication series

NameAdvanced Materials Research
Volume314-316
ISSN (Print)10226680

Other

Other2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011
CityGuangzhou
Period16/9/1118/9/11

Fingerprint

Microfabrication
Inductance
MEMS
Substrates
Costs

Keywords

  • Adhesive bonding
  • MEMS transformer
  • S-parameter measurement
  • Sandwich structure

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yunas, J., & Yeop Majlis, B. (2011). Microfabrication of sandwich micro-transformers. In Advanced Materials Research (Vol. 314-316, pp. 1836-1840). (Advanced Materials Research; Vol. 314-316). https://doi.org/10.4028/www.scientific.net/AMR.314-316.1836

Microfabrication of sandwich micro-transformers. / Yunas, Jumril; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 314-316 2011. p. 1836-1840 (Advanced Materials Research; Vol. 314-316).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yunas, J & Yeop Majlis, B 2011, Microfabrication of sandwich micro-transformers. in Advanced Materials Research. vol. 314-316, Advanced Materials Research, vol. 314-316, pp. 1836-1840, 2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011, Guangzhou, 16/9/11. https://doi.org/10.4028/www.scientific.net/AMR.314-316.1836
Yunas J, Yeop Majlis B. Microfabrication of sandwich micro-transformers. In Advanced Materials Research. Vol. 314-316. 2011. p. 1836-1840. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.314-316.1836
Yunas, Jumril ; Yeop Majlis, Burhanuddin. / Microfabrication of sandwich micro-transformers. Advanced Materials Research. Vol. 314-316 2011. pp. 1836-1840 (Advanced Materials Research).
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