Microfabrication and characterization of stack coupled inductor coils for magnetic sensors and actuators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A Planar square stack coupled inductor coils on silicon substrate has been fabricated using MEMS technology. The fabrication process utilized a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. The basic characteristics of the coupled inductors were discussed in wide range of operating frequency. The analysis results showed that the geometry of the inductor coil strongly affects the basic characteristics of the coils. The results of the study have promised a good prospect for the development of fully integrated planar magnetic field generator for sensing and actuating purposes.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages270-274
Number of pages5
Volume705
DOIs
Publication statusPublished - 2013
Event2013 International Conference on MEMS and Mechanics, MEMSM 2013 - Wuhan
Duration: 15 Mar 201316 Mar 2013

Publication series

NameAdvanced Materials Research
Volume705
ISSN (Print)10226680

Other

Other2013 International Conference on MEMS and Mechanics, MEMSM 2013
CityWuhan
Period15/3/1316/3/13

Fingerprint

Magnetic actuators
Magnetic sensors
Microfabrication
MEMS
Magnetic fields
Fabrication
Silicon
Geometry
Substrates
Costs

Keywords

  • Coupled inductor
  • Mems fabrication
  • Sensor and actuator
  • Stacked planar coils

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yunas, J., Yeop Majlis, B., & Roer, E. P. (2013). Microfabrication and characterization of stack coupled inductor coils for magnetic sensors and actuators. In Advanced Materials Research (Vol. 705, pp. 270-274). (Advanced Materials Research; Vol. 705). https://doi.org/10.4028/www.scientific.net/AMR.705.270

Microfabrication and characterization of stack coupled inductor coils for magnetic sensors and actuators. / Yunas, Jumril; Yeop Majlis, Burhanuddin; Roer, Eka Pawinanto.

Advanced Materials Research. Vol. 705 2013. p. 270-274 (Advanced Materials Research; Vol. 705).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yunas, J, Yeop Majlis, B & Roer, EP 2013, Microfabrication and characterization of stack coupled inductor coils for magnetic sensors and actuators. in Advanced Materials Research. vol. 705, Advanced Materials Research, vol. 705, pp. 270-274, 2013 International Conference on MEMS and Mechanics, MEMSM 2013, Wuhan, 15/3/13. https://doi.org/10.4028/www.scientific.net/AMR.705.270
Yunas, Jumril ; Yeop Majlis, Burhanuddin ; Roer, Eka Pawinanto. / Microfabrication and characterization of stack coupled inductor coils for magnetic sensors and actuators. Advanced Materials Research. Vol. 705 2013. pp. 270-274 (Advanced Materials Research).
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