Microelectromechanical systems for biomimetical applications

Latif Rhonira, Enrico Mastropaolo, Andy Bunting, Rebecca Cheung, Thomas Koickal, Alister Hamilton, Michael Newton, Leslie Smith

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

An etch release process capable of releasing long resonant gate transistor bridges from a sacrificial layer has been studied as a step towards developing a system to mimic the cochlear mechanism inside the human ear. The developed etch release process involves the use of a gentle etch tool that is capable of a clean and damage-free etch release. The influence of temperature and oxygen/nitrogen gas flow rates on the undercut etch rates and the profiles of photoresist and polyimide sacrificial layers have been investigated. An array of aluminum bridges of length 0.278-1.618 mm, which cover the frequencies from 1 to 33.86 kHz, has been designed and released from a sacrificial layer. The resonating beams have been measured.

Original languageEnglish
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume28
Issue number6
DOIs
Publication statusPublished - 2010
Externally publishedYes

Fingerprint

Aluminum bridges
Photoresists
Polyimides
microelectromechanical systems
MEMS
Flow of gases
Transistors
Nitrogen
Flow rate
Oxygen
releasing
ear
polyimides
photoresists
Temperature
gas flow
transistors
flow velocity
damage
aluminum

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Microelectromechanical systems for biomimetical applications. / Rhonira, Latif; Mastropaolo, Enrico; Bunting, Andy; Cheung, Rebecca; Koickal, Thomas; Hamilton, Alister; Newton, Michael; Smith, Leslie.

In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 28, No. 6, 2010.

Research output: Contribution to journalArticle

Rhonira, Latif ; Mastropaolo, Enrico ; Bunting, Andy ; Cheung, Rebecca ; Koickal, Thomas ; Hamilton, Alister ; Newton, Michael ; Smith, Leslie. / Microelectromechanical systems for biomimetical applications. In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 2010 ; Vol. 28, No. 6.
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