Micro-heater filament on polyimide membrane for gas sensor applications

Mimiwaty Mohd Noor, Gandi Sugandi, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Micro-heater filaments on polyimide membrane for micro gas sensors are fabricated and measured. Resistance as well as power consumption are calculated and temperature of the filament is then extracted. The polyimide membrane is supported by silicon frame that has been etched from the back side by bulk micromachining in a potassium hydroxide (KOH) solution. The filament is made of platinum with a thickness of 300 nm. The membrane thickness is 20 μm. It has an area of 3.5 mm × 3.5 mm and the area covered by the heater filament is 750 μm × 750 μm. The filament shows power consumption of 243 mW at temperature of 115 C.

Original languageEnglish
Title of host publication2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings
Pages360-362
Number of pages3
DOIs
Publication statusPublished - 2012
Event2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Kuala Lumpur
Duration: 19 Sep 201221 Sep 2012

Other

Other2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012
CityKuala Lumpur
Period19/9/1221/9/12

Fingerprint

Chemical sensors
Polyimides
Membranes
Electric power utilization
Potassium hydroxide
Micromachining
Platinum
Silicon
Temperature

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Noor, M. M., Sugandi, G., & Yeop Majlis, B. (2012). Micro-heater filament on polyimide membrane for gas sensor applications. In 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings (pp. 360-362). [6417160] https://doi.org/10.1109/SMElec.2012.6417160

Micro-heater filament on polyimide membrane for gas sensor applications. / Noor, Mimiwaty Mohd; Sugandi, Gandi; Yeop Majlis, Burhanuddin.

2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings. 2012. p. 360-362 6417160.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Noor, MM, Sugandi, G & Yeop Majlis, B 2012, Micro-heater filament on polyimide membrane for gas sensor applications. in 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings., 6417160, pp. 360-362, 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012, Kuala Lumpur, 19/9/12. https://doi.org/10.1109/SMElec.2012.6417160
Noor MM, Sugandi G, Yeop Majlis B. Micro-heater filament on polyimide membrane for gas sensor applications. In 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings. 2012. p. 360-362. 6417160 https://doi.org/10.1109/SMElec.2012.6417160
Noor, Mimiwaty Mohd ; Sugandi, Gandi ; Yeop Majlis, Burhanuddin. / Micro-heater filament on polyimide membrane for gas sensor applications. 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings. 2012. pp. 360-362
@inproceedings{059eef2306b242a499c270a98100983e,
title = "Micro-heater filament on polyimide membrane for gas sensor applications",
abstract = "Micro-heater filaments on polyimide membrane for micro gas sensors are fabricated and measured. Resistance as well as power consumption are calculated and temperature of the filament is then extracted. The polyimide membrane is supported by silicon frame that has been etched from the back side by bulk micromachining in a potassium hydroxide (KOH) solution. The filament is made of platinum with a thickness of 300 nm. The membrane thickness is 20 μm. It has an area of 3.5 mm × 3.5 mm and the area covered by the heater filament is 750 μm × 750 μm. The filament shows power consumption of 243 mW at temperature of 115 C.",
author = "Noor, {Mimiwaty Mohd} and Gandi Sugandi and {Yeop Majlis}, Burhanuddin",
year = "2012",
doi = "10.1109/SMElec.2012.6417160",
language = "English",
isbn = "9781467323963",
pages = "360--362",
booktitle = "2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings",

}

TY - GEN

T1 - Micro-heater filament on polyimide membrane for gas sensor applications

AU - Noor, Mimiwaty Mohd

AU - Sugandi, Gandi

AU - Yeop Majlis, Burhanuddin

PY - 2012

Y1 - 2012

N2 - Micro-heater filaments on polyimide membrane for micro gas sensors are fabricated and measured. Resistance as well as power consumption are calculated and temperature of the filament is then extracted. The polyimide membrane is supported by silicon frame that has been etched from the back side by bulk micromachining in a potassium hydroxide (KOH) solution. The filament is made of platinum with a thickness of 300 nm. The membrane thickness is 20 μm. It has an area of 3.5 mm × 3.5 mm and the area covered by the heater filament is 750 μm × 750 μm. The filament shows power consumption of 243 mW at temperature of 115 C.

AB - Micro-heater filaments on polyimide membrane for micro gas sensors are fabricated and measured. Resistance as well as power consumption are calculated and temperature of the filament is then extracted. The polyimide membrane is supported by silicon frame that has been etched from the back side by bulk micromachining in a potassium hydroxide (KOH) solution. The filament is made of platinum with a thickness of 300 nm. The membrane thickness is 20 μm. It has an area of 3.5 mm × 3.5 mm and the area covered by the heater filament is 750 μm × 750 μm. The filament shows power consumption of 243 mW at temperature of 115 C.

UR - http://www.scopus.com/inward/record.url?scp=84874145722&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84874145722&partnerID=8YFLogxK

U2 - 10.1109/SMElec.2012.6417160

DO - 10.1109/SMElec.2012.6417160

M3 - Conference contribution

AN - SCOPUS:84874145722

SN - 9781467323963

SP - 360

EP - 362

BT - 2012 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012 - Proceedings

ER -