Micro- and nanomechanical properties of diamond film with various surface morphologies

A. Bogus, I. C. Gebeshuber, A. Pauschitz, Manish Roy, R. Haubner

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

The morphologies of chemical vapour deposited (CVD) diamond films can be changed over a wide range by controlling the process parameters of the deposition. The surface morphologies of the film in turn, govern the micro- and nanomechanical properties of the film. In view of these, diamond films having three different types of morphologies namely coarse ballas, fine ballas and faceted, have been deposited using microwave chemical vapour deposition (MWCVD) technique. The morphology, and nature of bonds of these films are characterised with the help of scanning electron microscopy (SEM) and Raman spectroscopy. Hardness of the films is evaluated using nanoindenter. Force spectroscopy, topographies and lateral force values of these films are estimated by means of atomic force microscopy (AFM). Results indicate that films having fine ballas morphology exhibit the minimum roughness whereas film with faceted morphology has highest relative hardness. The friction force was found to be minimum with the film having fine ballas morphology and the friction force was maximum with film having coarse ballas morphology.

Original languageEnglish
Pages (from-to)1998-2004
Number of pages7
JournalDiamond and Related Materials
Volume17
Issue number12
DOIs
Publication statusPublished - Dec 2008
Externally publishedYes

Fingerprint

Diamond films
diamond films
Surface morphology
friction
hardness
Hardness
Friction
Topography
Raman spectroscopy
Chemical vapor deposition
Atomic force microscopy
topography
roughness
Surface roughness
Vapors
Microwaves
vapor deposition
atomic force microscopy
Spectroscopy
vapors

Keywords

  • Chemical vapour deposition Nanotribology
  • Diamond film
  • Morphology

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Chemistry(all)

Cite this

Micro- and nanomechanical properties of diamond film with various surface morphologies. / Bogus, A.; Gebeshuber, I. C.; Pauschitz, A.; Roy, Manish; Haubner, R.

In: Diamond and Related Materials, Vol. 17, No. 12, 12.2008, p. 1998-2004.

Research output: Contribution to journalArticle

Bogus, A. ; Gebeshuber, I. C. ; Pauschitz, A. ; Roy, Manish ; Haubner, R. / Micro- and nanomechanical properties of diamond film with various surface morphologies. In: Diamond and Related Materials. 2008 ; Vol. 17, No. 12. pp. 1998-2004.
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