MEMS-based piezoelectric micropump for precise liquid handling

Juliana Johari, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A micropump is described which uses a piezoelectric actuator to deliver liquid from pump pulsations at volumetric flow rates approaching nl min -1 even at high loading levels (high output pressures). This micropump uses a bimorph which bends when a voltage is applied to the piezo-actuator. By inserting valves into the device, the pump can operate continuously with volumetric pumping rate determined by the frequency of the driving voltage to the pump chamber.

Original languageEnglish
Title of host publicationProceedings of the 2012 International Conference on System Engineering and Technology, ICSET 2012
DOIs
Publication statusPublished - 2012
Event2012 International Conference on System Engineering and Technology, ICSET 2012 - Bandung
Duration: 11 Sep 201212 Sep 2012

Other

Other2012 International Conference on System Engineering and Technology, ICSET 2012
CityBandung
Period11/9/1212/9/12

Fingerprint

MEMS
Pumps
Liquids
Piezoelectric actuators
Electric potential
Actuators
Flow rate

Keywords

  • microfluidic
  • micropump
  • piezoelectric
  • valveless and nozzle-diffuser

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Control and Systems Engineering

Cite this

Johari, J., & Yeop Majlis, B. (2012). MEMS-based piezoelectric micropump for precise liquid handling. In Proceedings of the 2012 International Conference on System Engineering and Technology, ICSET 2012 [6339327] https://doi.org/10.1109/ICSEngT.2012.6339327

MEMS-based piezoelectric micropump for precise liquid handling. / Johari, Juliana; Yeop Majlis, Burhanuddin.

Proceedings of the 2012 International Conference on System Engineering and Technology, ICSET 2012. 2012. 6339327.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Johari, J & Yeop Majlis, B 2012, MEMS-based piezoelectric micropump for precise liquid handling. in Proceedings of the 2012 International Conference on System Engineering and Technology, ICSET 2012., 6339327, 2012 International Conference on System Engineering and Technology, ICSET 2012, Bandung, 11/9/12. https://doi.org/10.1109/ICSEngT.2012.6339327
Johari J, Yeop Majlis B. MEMS-based piezoelectric micropump for precise liquid handling. In Proceedings of the 2012 International Conference on System Engineering and Technology, ICSET 2012. 2012. 6339327 https://doi.org/10.1109/ICSEngT.2012.6339327
Johari, Juliana ; Yeop Majlis, Burhanuddin. / MEMS-based piezoelectric micropump for precise liquid handling. Proceedings of the 2012 International Conference on System Engineering and Technology, ICSET 2012. 2012.
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