Mechanistic study on highly crystalline (002) plane bounded ZnO nanofilms prepared via direct current magnetron sputtering

Hock Beng Lee, Mohammad Hafizuddin Jumali, Riski Titian Ginting, Sin Tee Tan, Chi Chin Yap, Chun Hui Tan

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

ZnO nanofilm has been irreplaceable especially in nanoscale researches due to the unique tunability of its morphology and semiconductor properties, suiting the needs of different applications. In present work, we employed direct current (DC) magnetron sputtering technique to deposit ZnO films, aiming to elucidate the relationship between sputtering pressure and the morphology, crystallinity and defect states of the films. The sputtering pressure was deliberately varied at low pressure regime and highly crystalline (002) plane bounded ZnO nanofilms were successfully prepared at the pressure condition of 15.0 mTorr. With increasing sputtering pressure, photoluminescence analysis indicates that more intrinsic defects were created in ZnO lattice structure. In contrast, Hall Effect measurement shows that the sheet resistivity of ZnO film reduced, corresponding to the increasing number of free charge carriers inside the films. The thermodynamic and kinetic transitions among the reactants and the texture of sputtering surface are the major factors affecting the formation of high quality ZnO nanofilms. The highly crystalline nanograined ZnO films reported in this study is a very promising structure with interesting material properties for future optoelectronic and spintronic applications.

Original languageEnglish
Pages (from-to)83-88
Number of pages6
JournalMaterials Letters
Volume161
DOIs
Publication statusPublished - 25 Aug 2015

Fingerprint

Magnetron sputtering
magnetron sputtering
direct current
Sputtering
Crystalline materials
sputtering
Magnetoelectronics
Defects
defects
Hall effect
Charge carriers
Optoelectronic devices
charge carriers
crystallinity
Materials properties
Photoluminescence
Deposits
textures
low pressure
Textures

Keywords

  • Atomic force microscopy
  • Grain boundaries
  • Nanocrystalline materials
  • Nanofilm
  • Phase transformation
  • Sputtering

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Mechanistic study on highly crystalline (002) plane bounded ZnO nanofilms prepared via direct current magnetron sputtering. / Lee, Hock Beng; Jumali, Mohammad Hafizuddin; Ginting, Riski Titian; Tan, Sin Tee; Yap, Chi Chin; Tan, Chun Hui.

In: Materials Letters, Vol. 161, 25.08.2015, p. 83-88.

Research output: Contribution to journalArticle

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