Mechanical sensitivity enhancement of an area-changed capacitive accelerometer by optimization of the device geometry

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5 Citations (Scopus)

Abstract

A study of the enhancement of the mechanical sensitivity of an area-changed capacitive accelerometer by optimization of the device geometry is presented. The movable mass of the accelerometer was designed with many fingers connected in parallel and suspended over the stationary electrodes composed of differential comb fingers by means of mechanical beams anchored onto the substrate. The maximum displacement possible based on the chosen design structure was determined. From this displacement value the spring constant was calculated, and based on this spring constant value various combinations of the beam length and width were selected. The lengths and the widths were then varied and simulated using the Coventorware 2001.3 software. This was done as theoretical analysis showed that the mechanical beam dimensions are significantly more dominant in the overall device sensitivity. The displacement and spring constant variations with the beam dimensions at an applied acceleration was observed and analyzed. The same process was done for the number of fingers, length and thickness of each finger. Each of these was done in isolation based on the optimum geometry of the mechanical beams and tested to ensure that alterations of these aspects do not have a significant effect on the overall sensitivity. The modal and harmonic analysis were also simulated and observed to ensure the linearity and the stability of the dominant mode of the operation of the device. Optimum results of the device geometry are presented and discussed, along with suggested next steps.

Original languageEnglish
Pages (from-to)175-183
Number of pages9
JournalAnalog Integrated Circuits and Signal Processing
Volume44
Issue number2
DOIs
Publication statusPublished - Aug 2005

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Accelerometers
Geometry
Harmonic analysis
Modal analysis
Electrodes
Substrates

Keywords

  • Area-changed
  • Capacitive
  • MEMS
  • Microaccelerometer
  • Sensitivity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Signal Processing

Cite this

@article{20b3af6cd4ff490493a0c36e5dcb1e5b,
title = "Mechanical sensitivity enhancement of an area-changed capacitive accelerometer by optimization of the device geometry",
abstract = "A study of the enhancement of the mechanical sensitivity of an area-changed capacitive accelerometer by optimization of the device geometry is presented. The movable mass of the accelerometer was designed with many fingers connected in parallel and suspended over the stationary electrodes composed of differential comb fingers by means of mechanical beams anchored onto the substrate. The maximum displacement possible based on the chosen design structure was determined. From this displacement value the spring constant was calculated, and based on this spring constant value various combinations of the beam length and width were selected. The lengths and the widths were then varied and simulated using the Coventorware 2001.3 software. This was done as theoretical analysis showed that the mechanical beam dimensions are significantly more dominant in the overall device sensitivity. The displacement and spring constant variations with the beam dimensions at an applied acceleration was observed and analyzed. The same process was done for the number of fingers, length and thickness of each finger. Each of these was done in isolation based on the optimum geometry of the mechanical beams and tested to ensure that alterations of these aspects do not have a significant effect on the overall sensitivity. The modal and harmonic analysis were also simulated and observed to ensure the linearity and the stability of the dominant mode of the operation of the device. Optimum results of the device geometry are presented and discussed, along with suggested next steps.",
keywords = "Area-changed, Capacitive, MEMS, Microaccelerometer, Sensitivity",
author = "Badariah Bais and {Yeop Majlis}, Burhanuddin",
year = "2005",
month = "8",
doi = "10.1007/s10470-005-2598-6",
language = "English",
volume = "44",
pages = "175--183",
journal = "Analog Integrated Circuits and Signal Processing",
issn = "0925-1030",
publisher = "Springer Netherlands",
number = "2",

}

TY - JOUR

T1 - Mechanical sensitivity enhancement of an area-changed capacitive accelerometer by optimization of the device geometry

AU - Bais, Badariah

AU - Yeop Majlis, Burhanuddin

PY - 2005/8

Y1 - 2005/8

N2 - A study of the enhancement of the mechanical sensitivity of an area-changed capacitive accelerometer by optimization of the device geometry is presented. The movable mass of the accelerometer was designed with many fingers connected in parallel and suspended over the stationary electrodes composed of differential comb fingers by means of mechanical beams anchored onto the substrate. The maximum displacement possible based on the chosen design structure was determined. From this displacement value the spring constant was calculated, and based on this spring constant value various combinations of the beam length and width were selected. The lengths and the widths were then varied and simulated using the Coventorware 2001.3 software. This was done as theoretical analysis showed that the mechanical beam dimensions are significantly more dominant in the overall device sensitivity. The displacement and spring constant variations with the beam dimensions at an applied acceleration was observed and analyzed. The same process was done for the number of fingers, length and thickness of each finger. Each of these was done in isolation based on the optimum geometry of the mechanical beams and tested to ensure that alterations of these aspects do not have a significant effect on the overall sensitivity. The modal and harmonic analysis were also simulated and observed to ensure the linearity and the stability of the dominant mode of the operation of the device. Optimum results of the device geometry are presented and discussed, along with suggested next steps.

AB - A study of the enhancement of the mechanical sensitivity of an area-changed capacitive accelerometer by optimization of the device geometry is presented. The movable mass of the accelerometer was designed with many fingers connected in parallel and suspended over the stationary electrodes composed of differential comb fingers by means of mechanical beams anchored onto the substrate. The maximum displacement possible based on the chosen design structure was determined. From this displacement value the spring constant was calculated, and based on this spring constant value various combinations of the beam length and width were selected. The lengths and the widths were then varied and simulated using the Coventorware 2001.3 software. This was done as theoretical analysis showed that the mechanical beam dimensions are significantly more dominant in the overall device sensitivity. The displacement and spring constant variations with the beam dimensions at an applied acceleration was observed and analyzed. The same process was done for the number of fingers, length and thickness of each finger. Each of these was done in isolation based on the optimum geometry of the mechanical beams and tested to ensure that alterations of these aspects do not have a significant effect on the overall sensitivity. The modal and harmonic analysis were also simulated and observed to ensure the linearity and the stability of the dominant mode of the operation of the device. Optimum results of the device geometry are presented and discussed, along with suggested next steps.

KW - Area-changed

KW - Capacitive

KW - MEMS

KW - Microaccelerometer

KW - Sensitivity

UR - http://www.scopus.com/inward/record.url?scp=22144447867&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=22144447867&partnerID=8YFLogxK

U2 - 10.1007/s10470-005-2598-6

DO - 10.1007/s10470-005-2598-6

M3 - Article

AN - SCOPUS:22144447867

VL - 44

SP - 175

EP - 183

JO - Analog Integrated Circuits and Signal Processing

JF - Analog Integrated Circuits and Signal Processing

SN - 0925-1030

IS - 2

ER -