Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment

S. A. Zawawi, Azrul Azlan Hamzah, F. Mohd-Yasin, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and bottom (fixed) plate, which separated by an air gap. While, the vent holes were fabricated on the back plate to release trapped air and reduce damping. In order to withstand high temperature and pressure, a 1.0 μm thick SiC diaphragm was utilized as the top membrane. The developed SiC could withstand a temperature up to 1400°C. Moreover, the 3 μm air gap is invented between the top membrane and the bottom plate via wafer bonding. COMSOL Multiphysics simulation software was used for design optimization. Various diaphragms with sizes of 600 μm2, 700 μm2, 800 μm2, 900 μm2 and 1000 μm2 are loaded with external pressure. From this analysis, it was observed that SiC microphone with diaphragm width of 1000 μm2 produced optimal surface vibrations, with first-mode resonant frequency of approximately 36 kHz. The maximum deflection value at resonant frequency is less than the air gap thickness of 8 mu;m, thus eliminating the possibility of shortage between plates during operation. As summary, the designed SiC capacitive microphone has high potential and it is suitable to be applied in ultrasonic gas leaking detection in harsh environment.

Original languageEnglish
Title of host publicationNanoengineering
Subtitle of host publicationFabrication, Properties, Optics, and Devices XIV
PublisherSPIE
Volume10354
ISBN (Electronic)9781510611658
DOIs
Publication statusPublished - 2017
EventNanoengineering: Fabrication, Properties, Optics, and Devices XIV 2017 - San Diego, United States
Duration: 9 Aug 201710 Aug 2017

Other

OtherNanoengineering: Fabrication, Properties, Optics, and Devices XIV 2017
CountryUnited States
CitySan Diego
Period9/8/1710/8/17

Fingerprint

Microphones
Diaphragms
microphones
Micro-electro-mechanical Systems
microelectromechanical systems
MEMS
diaphragms
ultrasonics
Ultrasonics
Air
air
Natural frequencies
Resonant Frequency
Gases
resonant frequencies
Membranes
Wafer bonding
Vents
Petroleum
membranes

Keywords

  • MEMS capacitive microphone
  • Silicon carbide
  • ultrasonic detection

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Zawawi, S. A., Hamzah, A. A., Mohd-Yasin, F., & Yeop Majlis, B. (2017). Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment. In Nanoengineering: Fabrication, Properties, Optics, and Devices XIV (Vol. 10354). [103541J] SPIE. https://doi.org/10.1117/12.2273717

Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment. / Zawawi, S. A.; Hamzah, Azrul Azlan; Mohd-Yasin, F.; Yeop Majlis, Burhanuddin.

Nanoengineering: Fabrication, Properties, Optics, and Devices XIV. Vol. 10354 SPIE, 2017. 103541J.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zawawi, SA, Hamzah, AA, Mohd-Yasin, F & Yeop Majlis, B 2017, Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment. in Nanoengineering: Fabrication, Properties, Optics, and Devices XIV. vol. 10354, 103541J, SPIE, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV 2017, San Diego, United States, 9/8/17. https://doi.org/10.1117/12.2273717
Zawawi SA, Hamzah AA, Mohd-Yasin F, Yeop Majlis B. Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment. In Nanoengineering: Fabrication, Properties, Optics, and Devices XIV. Vol. 10354. SPIE. 2017. 103541J https://doi.org/10.1117/12.2273717
Zawawi, S. A. ; Hamzah, Azrul Azlan ; Mohd-Yasin, F. ; Yeop Majlis, Burhanuddin. / Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment. Nanoengineering: Fabrication, Properties, Optics, and Devices XIV. Vol. 10354 SPIE, 2017.
@inproceedings{5a37084b70204002b1533a81d1b546e5,
title = "Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment",
abstract = "In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and bottom (fixed) plate, which separated by an air gap. While, the vent holes were fabricated on the back plate to release trapped air and reduce damping. In order to withstand high temperature and pressure, a 1.0 μm thick SiC diaphragm was utilized as the top membrane. The developed SiC could withstand a temperature up to 1400°C. Moreover, the 3 μm air gap is invented between the top membrane and the bottom plate via wafer bonding. COMSOL Multiphysics simulation software was used for design optimization. Various diaphragms with sizes of 600 μm2, 700 μm2, 800 μm2, 900 μm2 and 1000 μm2 are loaded with external pressure. From this analysis, it was observed that SiC microphone with diaphragm width of 1000 μm2 produced optimal surface vibrations, with first-mode resonant frequency of approximately 36 kHz. The maximum deflection value at resonant frequency is less than the air gap thickness of 8 mu;m, thus eliminating the possibility of shortage between plates during operation. As summary, the designed SiC capacitive microphone has high potential and it is suitable to be applied in ultrasonic gas leaking detection in harsh environment.",
keywords = "MEMS capacitive microphone, Silicon carbide, ultrasonic detection",
author = "Zawawi, {S. A.} and Hamzah, {Azrul Azlan} and F. Mohd-Yasin and {Yeop Majlis}, Burhanuddin",
year = "2017",
doi = "10.1117/12.2273717",
language = "English",
volume = "10354",
booktitle = "Nanoengineering",
publisher = "SPIE",

}

TY - GEN

T1 - Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment

AU - Zawawi, S. A.

AU - Hamzah, Azrul Azlan

AU - Mohd-Yasin, F.

AU - Yeop Majlis, Burhanuddin

PY - 2017

Y1 - 2017

N2 - In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and bottom (fixed) plate, which separated by an air gap. While, the vent holes were fabricated on the back plate to release trapped air and reduce damping. In order to withstand high temperature and pressure, a 1.0 μm thick SiC diaphragm was utilized as the top membrane. The developed SiC could withstand a temperature up to 1400°C. Moreover, the 3 μm air gap is invented between the top membrane and the bottom plate via wafer bonding. COMSOL Multiphysics simulation software was used for design optimization. Various diaphragms with sizes of 600 μm2, 700 μm2, 800 μm2, 900 μm2 and 1000 μm2 are loaded with external pressure. From this analysis, it was observed that SiC microphone with diaphragm width of 1000 μm2 produced optimal surface vibrations, with first-mode resonant frequency of approximately 36 kHz. The maximum deflection value at resonant frequency is less than the air gap thickness of 8 mu;m, thus eliminating the possibility of shortage between plates during operation. As summary, the designed SiC capacitive microphone has high potential and it is suitable to be applied in ultrasonic gas leaking detection in harsh environment.

AB - In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and bottom (fixed) plate, which separated by an air gap. While, the vent holes were fabricated on the back plate to release trapped air and reduce damping. In order to withstand high temperature and pressure, a 1.0 μm thick SiC diaphragm was utilized as the top membrane. The developed SiC could withstand a temperature up to 1400°C. Moreover, the 3 μm air gap is invented between the top membrane and the bottom plate via wafer bonding. COMSOL Multiphysics simulation software was used for design optimization. Various diaphragms with sizes of 600 μm2, 700 μm2, 800 μm2, 900 μm2 and 1000 μm2 are loaded with external pressure. From this analysis, it was observed that SiC microphone with diaphragm width of 1000 μm2 produced optimal surface vibrations, with first-mode resonant frequency of approximately 36 kHz. The maximum deflection value at resonant frequency is less than the air gap thickness of 8 mu;m, thus eliminating the possibility of shortage between plates during operation. As summary, the designed SiC capacitive microphone has high potential and it is suitable to be applied in ultrasonic gas leaking detection in harsh environment.

KW - MEMS capacitive microphone

KW - Silicon carbide

KW - ultrasonic detection

UR - http://www.scopus.com/inward/record.url?scp=85033364633&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85033364633&partnerID=8YFLogxK

U2 - 10.1117/12.2273717

DO - 10.1117/12.2273717

M3 - Conference contribution

VL - 10354

BT - Nanoengineering

PB - SPIE

ER -