Mechanical characteristics of porous silicon membrane for filtration in artificial kidney

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Silicon is a promising material due to it having reliable and desirable characteristics for making porous silicon membrane. Porous membrane is widely used in various applications especially in bioMEMS, Lab on Chip and MEMS. Normally, porous membrane functions as a part of filtration system that can be integrated with other systems to make a complete device. The porous silicon membrane is simulated using COMSOL 4.3a for mechanical verification. This work compares the simulation result of the silicon membrane design with theoretical calculation. This paper studies the effect of pressure across the silicon membrane based on the deflection and von Mises stress at the centre of silicon membrane. The maximum deflection and von Mises stress of different membrane thickness and pore shapes are compared against various levels of pressure applied on the silicon membrane surface. The 100 nm thin silicon membrane studied was found to be far superior to the 25 nm silicon thin membrane, being able to mechanically withstand the applied pressure up to 7.33 kPa (55 mmHg).

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages119-122
Number of pages4
ISBN (Print)9781479957606
DOIs
Publication statusPublished - 10 Oct 2014
Event11th IEEE International Conference on Semiconductor Electronics, ICSE 2014 - Kuala Lumpur
Duration: 27 Aug 201429 Aug 2014

Other

Other11th IEEE International Conference on Semiconductor Electronics, ICSE 2014
CityKuala Lumpur
Period27/8/1429/8/14

Fingerprint

Porous silicon
Silicon
Membranes
MEMS

Keywords

  • COMSOL ver. 4.3
  • Deflection
  • Pores
  • Silicon Membrane
  • von Mises Stress

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Burham, N., Hamzah, A. A., & Yeop Majlis, B. (2014). Mechanical characteristics of porous silicon membrane for filtration in artificial kidney. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 119-122). [6920810] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2014.6920810

Mechanical characteristics of porous silicon membrane for filtration in artificial kidney. / Burham, Norhafizah; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. p. 119-122 6920810.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Burham, N, Hamzah, AA & Yeop Majlis, B 2014, Mechanical characteristics of porous silicon membrane for filtration in artificial kidney. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 6920810, Institute of Electrical and Electronics Engineers Inc., pp. 119-122, 11th IEEE International Conference on Semiconductor Electronics, ICSE 2014, Kuala Lumpur, 27/8/14. https://doi.org/10.1109/SMELEC.2014.6920810
Burham N, Hamzah AA, Yeop Majlis B. Mechanical characteristics of porous silicon membrane for filtration in artificial kidney. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc. 2014. p. 119-122. 6920810 https://doi.org/10.1109/SMELEC.2014.6920810
Burham, Norhafizah ; Hamzah, Azrul Azlan ; Yeop Majlis, Burhanuddin. / Mechanical characteristics of porous silicon membrane for filtration in artificial kidney. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 119-122
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