Mechanical behaviour of a 10g MEMS non-crossing differential capacitive accelerometer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A MEMS lateral capacitive accelerometer was designed and simulated. The accelerometer used in the study is based on gap-difference principle. It consists of 74 pairs of fingers and the proofmass suspended by two straight truss springs at both ends. Important parameters such as displacement, differential capacitance, harmonic response and sensitivity were studied and results presented. The shock resistance was also simulated to ensure the robustness of the device against external shock. The accelerometer is 40μm thick and 0.6mm × 0.7mm in size. It has a resonant frequency of 3.60 kHz at acceleration of 10g.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages354-358
Number of pages5
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Accelerometers
MEMS
Natural frequencies
Capacitance

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Manut, A., Bais, B., & Yeop Majlis, B. (2004). Mechanical behaviour of a 10g MEMS non-crossing differential capacitive accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 354-358). [1620904]

Mechanical behaviour of a 10g MEMS non-crossing differential capacitive accelerometer. / Manut, Azrif; Bais, Badariah; Yeop Majlis, Burhanuddin.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 354-358 1620904.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Manut, A, Bais, B & Yeop Majlis, B 2004, Mechanical behaviour of a 10g MEMS non-crossing differential capacitive accelerometer. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620904, pp. 354-358, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Manut A, Bais B, Yeop Majlis B. Mechanical behaviour of a 10g MEMS non-crossing differential capacitive accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 354-358. 1620904
Manut, Azrif ; Bais, Badariah ; Yeop Majlis, Burhanuddin. / Mechanical behaviour of a 10g MEMS non-crossing differential capacitive accelerometer. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 354-358
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