Mechanical analysis of MEMS diaphragm for bladder pressure monitoring

Norliana Yusof, Badariah Bais, Burhanuddin Yeop Majlis, Norhayati Soin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Implantable bladder pressure sensor need to be very sensitive due to its very low pressure range detection. Hence, proper choice of a diaphragm structure is important as it would give an enormous impact on the sensitivity of a MEMS sensor. In this study, finite element (FEA) analysis is conducted to investigate the mechanical characteristics on four various diaphragm structures; clamped, slotted, corrugated and bossed square diaphragm of a capacitive MEMS pressure sensor. The MEMS diaphragm were designed and simulated using Comsol Multiphysics software. The static analysis was conducted in order to investigate the stress distribution, total displacement and capacitance meanwhile the modal analysis was conducted to determine the resonant frequency of each structure. From static analysis, it can be observed that slotted diaphragm has higher sensitivity compared to other structures. However, from modal analysis, it was found that the highest mechanical natural frequency is achieved by clamped diaphragm. From this study, it can be concluded that slotted diaphragm is the most suitable choice for designing the implantable MEMS bladder pressure sensor due to its high sensitivity and meet the requirement of desirable mechanical natural frequency of the sensor.

Original languageEnglish
Title of host publicationProceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages22-25
Number of pages4
ISBN (Electronic)9781509040285
DOIs
Publication statusPublished - 16 Oct 2017
Event11th IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017 - Batu Ferringhi, Penang, Malaysia
Duration: 23 Aug 201725 Aug 2017

Other

Other11th IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017
CountryMalaysia
CityBatu Ferringhi, Penang
Period23/8/1725/8/17

Fingerprint

bladder
diaphragms
Diaphragms
microelectromechanical systems
MEMS
Monitoring
Pressure sensors
pressure sensors
resonant frequencies
Natural frequencies
Static analysis
Modal analysis
sensitivity
sensors
Sensors
stress distribution
Stress concentration
Capacitance
low pressure
capacitance

Keywords

  • bladder pressure
  • MEMS capacitive pressure sensor
  • sensitivity analysis
  • square diaphragm

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation
  • Biomedical Engineering

Cite this

Yusof, N., Bais, B., Yeop Majlis, B., & Soin, N. (2017). Mechanical analysis of MEMS diaphragm for bladder pressure monitoring. In Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017 (pp. 22-25). [8069147] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/RSM.2017.8069147

Mechanical analysis of MEMS diaphragm for bladder pressure monitoring. / Yusof, Norliana; Bais, Badariah; Yeop Majlis, Burhanuddin; Soin, Norhayati.

Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 22-25 8069147.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yusof, N, Bais, B, Yeop Majlis, B & Soin, N 2017, Mechanical analysis of MEMS diaphragm for bladder pressure monitoring. in Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017., 8069147, Institute of Electrical and Electronics Engineers Inc., pp. 22-25, 11th IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017, Batu Ferringhi, Penang, Malaysia, 23/8/17. https://doi.org/10.1109/RSM.2017.8069147
Yusof N, Bais B, Yeop Majlis B, Soin N. Mechanical analysis of MEMS diaphragm for bladder pressure monitoring. In Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 22-25. 8069147 https://doi.org/10.1109/RSM.2017.8069147
Yusof, Norliana ; Bais, Badariah ; Yeop Majlis, Burhanuddin ; Soin, Norhayati. / Mechanical analysis of MEMS diaphragm for bladder pressure monitoring. Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 22-25
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