Materials design and analysis of low-power MEMS microspeaker using magnetic actuation technology

Fatimah Lina Ayatollahi, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

This paper presents material properties of a micromachined mesoscopic acoustic speaker for hearing aid applications. The microspeaker has a single turn copper coil on a polyimide membrane, and an NdFeB permanent magnet beneath the membrane. The fields due to the permanent magnet were computed using FEMM. Then, forces based on the fields and on the coil driving current were computed. Finally, IntelliSuite was employed to simulate membrane displacements and stresses. The device, with a polyimide membrane diameter of 2.5 mm and thickness of 2 μm, consumes 3.4 mW to generate a sound pressure level of 108 dB in the human ear.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages243-246
Number of pages4
Volume74
DOIs
Publication statusPublished - 2009
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore
Duration: 28 Jun 20093 Jul 2009

Publication series

NameAdvanced Materials Research
Volume74
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT 2009
CitySingpore
Period28/6/093/7/09

Fingerprint

MEMS
Membranes
Polyimides
Permanent magnets
Hearing aids
Materials properties
Acoustics
Acoustic waves
Copper

Keywords

  • Coil
  • Hearing aids
  • Membrane
  • MEMS
  • Microspeaker
  • Polyimide
  • Rare erath magnet

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ayatollahi, F. L., & Yeop Majlis, B. (2009). Materials design and analysis of low-power MEMS microspeaker using magnetic actuation technology. In Advanced Materials Research (Vol. 74, pp. 243-246). (Advanced Materials Research; Vol. 74). https://doi.org/10.4028/www.scientific.net/AMR.74.243

Materials design and analysis of low-power MEMS microspeaker using magnetic actuation technology. / Ayatollahi, Fatimah Lina; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 74 2009. p. 243-246 (Advanced Materials Research; Vol. 74).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ayatollahi, FL & Yeop Majlis, B 2009, Materials design and analysis of low-power MEMS microspeaker using magnetic actuation technology. in Advanced Materials Research. vol. 74, Advanced Materials Research, vol. 74, pp. 243-246, International Conference on Materials for Advanced Technologies, ICMAT 2009, Singpore, 28/6/09. https://doi.org/10.4028/www.scientific.net/AMR.74.243
Ayatollahi, Fatimah Lina ; Yeop Majlis, Burhanuddin. / Materials design and analysis of low-power MEMS microspeaker using magnetic actuation technology. Advanced Materials Research. Vol. 74 2009. pp. 243-246 (Advanced Materials Research).
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