Low cost procedure for fabrication of micro-nozzles and micro-diffusers

Alireza Bahadorimehr, Jumril Yunas, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, we present a simple, rapid, and low-cost procedure for fabricating micro-nozzles and micro-diffusers using in microfluidic devices to control the flow of the fluid which pass through the microchannels. This procedure uses commercially accessible and typical materials, which is used in several applications in microelectronic labs. Glass is used as main substrate to get advantages of photo transparent specifications of this material. In this method a thick layer of positive photoresist on the glass substrate for fabrication of lens is utilized. A mild BOE solution with additional HCL is employed to achieve an excellent etching quality and a smoother etched surface. The depth of the surface can be reach to 100μm without PR damage effect after 1 hour of etching process. The aluminum evaporation process produces a thin layer of aluminum across the substrate which makes it as a block against passing the light. Dispensing SU-8 on Al layer and using UV back-exposure technique the tapered structured is fabricated as a mold for PDMS which can be used in different microfluidic applications. The simulation results shows that the focal length up to 800μm with the lens curvature of 150μm is achievable.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages321-324
Number of pages4
DOIs
Publication statusPublished - 2010
Event2010 IEEE International Conference on Semiconductor Electronics, ICSE 2010 - Melaka
Duration: 28 Jun 201030 Jun 2010

Other

Other2010 IEEE International Conference on Semiconductor Electronics, ICSE 2010
CityMelaka
Period28/6/1030/6/10

Fingerprint

Nozzles
Aluminum
Microfluidics
Fabrication
Etching
Lenses
Substrates
Costs
Glass
Photoresists
Microchannels
Microelectronics
Evaporation
Specifications
Fluids

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Bahadorimehr, A., Yunas, J., & Yeop Majlis, B. (2010). Low cost procedure for fabrication of micro-nozzles and micro-diffusers. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 321-324). [5549372] https://doi.org/10.1109/SMELEC.2010.5549372

Low cost procedure for fabrication of micro-nozzles and micro-diffusers. / Bahadorimehr, Alireza; Yunas, Jumril; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2010. p. 321-324 5549372.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bahadorimehr, A, Yunas, J & Yeop Majlis, B 2010, Low cost procedure for fabrication of micro-nozzles and micro-diffusers. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 5549372, pp. 321-324, 2010 IEEE International Conference on Semiconductor Electronics, ICSE 2010, Melaka, 28/6/10. https://doi.org/10.1109/SMELEC.2010.5549372
Bahadorimehr A, Yunas J, Yeop Majlis B. Low cost procedure for fabrication of micro-nozzles and micro-diffusers. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2010. p. 321-324. 5549372 https://doi.org/10.1109/SMELEC.2010.5549372
Bahadorimehr, Alireza ; Yunas, Jumril ; Yeop Majlis, Burhanuddin. / Low cost procedure for fabrication of micro-nozzles and micro-diffusers. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2010. pp. 321-324
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