Investigation into mass loading sensitivity of Sezawa wave mode-based surface acoustic wave sensors

Ajay Achath Mohanan, Md. Shabiul Islam, Sawal Hamid Md Ali, R. Parthiban, N. Ramakrishnan

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered for the simulation study. Initially the occurrence of Sezawa wave mode and displacement amplitude of the Rayleigh and Sezawa wave mode is studied for lower ZnO film thickness. Further, a thin film made of an arbitrary material is coated over the ZnO surface and the resonance frequency shift caused by mass loading of the film is estimated. It was observed that Sezawa wave mode shows significant sensitivity to change in mass loading and has higher sensitivity (eight times higher) than Rayleigh wave mode for the same device configuration. Further, the mass loading sensitivity was observed to be greater for a low ZnO film thickness to wavelength ratio. Accordingly, highly sensitive SAW sensors can be developed by coating a sensing medium over a layered SAW device and operating at Sezawa mode resonance frequency. The sensitivity can be increased by tuning the ZnO film thickness to wavelength ratio.

Original languageEnglish
Pages (from-to)2164-2175
Number of pages12
JournalSensors (Switzerland)
Volume13
Issue number2
DOIs
Publication statusPublished - 2013

Fingerprint

Surface waves
Acoustic waves
Film thickness
Acoustic surface wave devices
acoustics
sensitivity
sensors
Sensors
Equipment and Supplies
surface acoustic wave devices
film thickness
Coated materials
Wavelength
Rayleigh waves
Resonators
Tuning
Finite element method
Thin films
Coatings
wavelengths

Keywords

  • FEM simulation
  • Mass loading effect
  • Sensors
  • Sezawa wave mode
  • Surface acoustic wave devices

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Analytical Chemistry
  • Biochemistry

Cite this

Investigation into mass loading sensitivity of Sezawa wave mode-based surface acoustic wave sensors. / Mohanan, Ajay Achath; Islam, Md. Shabiul; Md Ali, Sawal Hamid; Parthiban, R.; Ramakrishnan, N.

In: Sensors (Switzerland), Vol. 13, No. 2, 2013, p. 2164-2175.

Research output: Contribution to journalArticle

Mohanan, Ajay Achath ; Islam, Md. Shabiul ; Md Ali, Sawal Hamid ; Parthiban, R. ; Ramakrishnan, N. / Investigation into mass loading sensitivity of Sezawa wave mode-based surface acoustic wave sensors. In: Sensors (Switzerland). 2013 ; Vol. 13, No. 2. pp. 2164-2175.
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