Integration of polymer microfluidic channels, vias, and connectors with silicon photonic sensors by one-step combined photopatterning and molding of OSTE

Carlos Errando-Herranz, Farizah Saharil, Albert Mola Romero, Niklas Sandstrom, Reza Zandi Shafagh, Wouter Van Der Wijngaart, Tommy Haraldsson, Kristinn B. Gylfason

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced OSTE polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic Mach-Zehnder interferometer refractive index sensor packaged by these means.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1613-1616
Number of pages4
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona
Duration: 16 Jun 201320 Jun 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CityBarcelona
Period16/6/1320/6/13

Fingerprint

Fluidics
Microfluidics
Molding
Photonics
Packaging
Silicon sensors
Silicon
Mach-Zehnder interferometers
Sensors
Polymers
Microchannels
Optical fibers
Refractive index
Fluids

Keywords

  • microfluidics
  • molding
  • Off-Stoichiometry Thiol-Ene
  • OSTE
  • photopatterning
  • Silicon photonics
  • wafer-level packaging

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Errando-Herranz, C., Saharil, F., Romero, A. M., Sandstrom, N., Shafagh, R. Z., Van Der Wijngaart, W., ... Gylfason, K. B. (2013). Integration of polymer microfluidic channels, vias, and connectors with silicon photonic sensors by one-step combined photopatterning and molding of OSTE. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 1613-1616). [6627092] https://doi.org/10.1109/Transducers.2013.6627092

Integration of polymer microfluidic channels, vias, and connectors with silicon photonic sensors by one-step combined photopatterning and molding of OSTE. / Errando-Herranz, Carlos; Saharil, Farizah; Romero, Albert Mola; Sandstrom, Niklas; Shafagh, Reza Zandi; Van Der Wijngaart, Wouter; Haraldsson, Tommy; Gylfason, Kristinn B.

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1613-1616 6627092.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Errando-Herranz, C, Saharil, F, Romero, AM, Sandstrom, N, Shafagh, RZ, Van Der Wijngaart, W, Haraldsson, T & Gylfason, KB 2013, Integration of polymer microfluidic channels, vias, and connectors with silicon photonic sensors by one-step combined photopatterning and molding of OSTE. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627092, pp. 1613-1616, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, 16/6/13. https://doi.org/10.1109/Transducers.2013.6627092
Errando-Herranz C, Saharil F, Romero AM, Sandstrom N, Shafagh RZ, Van Der Wijngaart W et al. Integration of polymer microfluidic channels, vias, and connectors with silicon photonic sensors by one-step combined photopatterning and molding of OSTE. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1613-1616. 6627092 https://doi.org/10.1109/Transducers.2013.6627092
Errando-Herranz, Carlos ; Saharil, Farizah ; Romero, Albert Mola ; Sandstrom, Niklas ; Shafagh, Reza Zandi ; Van Der Wijngaart, Wouter ; Haraldsson, Tommy ; Gylfason, Kristinn B. / Integration of polymer microfluidic channels, vias, and connectors with silicon photonic sensors by one-step combined photopatterning and molding of OSTE. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 1613-1616
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