Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE

Carlos Errando-Herranz, Farizah Saharil, Albert Mola Romero, Niklas Sandström, Reza Zandi Shafagh, Wouter Van Der Wijngaart, Tommy Haraldsson, Kristinn B. Gylfason

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We present a novel integration method for packaging silicon photonic sensors with polymer microfluidics, designed to be suitable for wafer-level production methods. The method addresses the previously unmet manufacturing challenges of matching the microfluidic footprint area to that of the photonics, and of robust bonding of microfluidic layers to biofunctionalized surfaces. We demonstrate the fabrication, in a single step, of a microfluidic layer in the recently introduced OSTE polymer, and the subsequent unassisted dry bonding of the microfluidic layer to a grating coupled silicon photonic ring resonator sensor chip. The microfluidic layer features photopatterned through holes (vias) for optical fiber probing and fluid connections, as well as molded microchannels and tube connectors, and is manufactured and subsequently bonded to a silicon sensor chip in less than 10 minutes. Combining this new microfluidic packaging method with photonic waveguide surface gratings for light coupling allows matching the size scale of microfluidics to that of current silicon photonic biosensors. To demonstrate the new method, we performed successful refractive index measurements of liquid ethanol and methanol samples, using the fabricated device. The minimum required sample volume for refractive index measurement is below one nanoliter.

Original languageEnglish
Pages (from-to)21293-21298
Number of pages6
JournalOptics Express
Volume21
Issue number18
DOIs
Publication statusPublished - 9 Sep 2013
Externally publishedYes

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gratings
photonics
sensors
silicon
packaging
chips
refractivity
production engineering
connectors
polymers
footprints
microchannels
bioinstrumentation
ethyl alcohol
manufacturing
methyl alcohol
optical fibers
resonators
wafers
tubes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Errando-Herranz, C., Saharil, F., Romero, A. M., Sandström, N., Shafagh, R. Z., Van Der Wijngaart, W., ... Gylfason, K. B. (2013). Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE. Optics Express, 21(18), 21293-21298. https://doi.org/10.1364/OE.21.021293

Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE. / Errando-Herranz, Carlos; Saharil, Farizah; Romero, Albert Mola; Sandström, Niklas; Shafagh, Reza Zandi; Van Der Wijngaart, Wouter; Haraldsson, Tommy; Gylfason, Kristinn B.

In: Optics Express, Vol. 21, No. 18, 09.09.2013, p. 21293-21298.

Research output: Contribution to journalArticle

Errando-Herranz, C, Saharil, F, Romero, AM, Sandström, N, Shafagh, RZ, Van Der Wijngaart, W, Haraldsson, T & Gylfason, KB 2013, 'Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE', Optics Express, vol. 21, no. 18, pp. 21293-21298. https://doi.org/10.1364/OE.21.021293
Errando-Herranz C, Saharil F, Romero AM, Sandström N, Shafagh RZ, Van Der Wijngaart W et al. Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE. Optics Express. 2013 Sep 9;21(18):21293-21298. https://doi.org/10.1364/OE.21.021293
Errando-Herranz, Carlos ; Saharil, Farizah ; Romero, Albert Mola ; Sandström, Niklas ; Shafagh, Reza Zandi ; Van Der Wijngaart, Wouter ; Haraldsson, Tommy ; Gylfason, Kristinn B. / Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE. In: Optics Express. 2013 ; Vol. 21, No. 18. pp. 21293-21298.
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