Kesan kuasa frekuensi radio terhadap komposisi ikatan kimia filem nipis a-CNxsebagai pengesan kelembapan

Translated title of the contribution: Influence of RF power on chemical bonding composition on a-CNxthin films as humidity sensor

Siti Aisyah Abd Aziz, Rozidawati Awang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The a-CNxthin film has chemical bonding of C-N (sp3), C=N (sp2) and C=N (sp1). C=N and C=N bonds are easily resolved by hydrogen attack during the film deposition process to form C-H and N-H bonds. The formation of graphite sp2components in the a-CNxthin film caused by the presence of nitrogen atom contributes to the reduction of the electrical resistance and enhances the electrical conductivity. These features are essential for a-CNxthin film application as a humidity sensor. In this study, amorphous carbon nitride films (a-CNx) are deposited on the quartz and silicon (111) substrate using PECVD techniques. The samples were deposited at different RF power at 40, 50, 60, 70 and 80 W and analyzed their effects on film chemical composition and films morphology as well as their ability as humidity sensor. D (sp2C) peak and G (sp3C) peak are clearly observed using Raman spectroscopy in all a-CNxthin films with the highest intensity obtained at RF 70 W. Films micrograph observed by field emission scanning electron microscopy (FESEM) show that surface morphology of all samples have a uniform structural shape of cauliflower. X-ray photoelectron spectroscopy (XPS) confirmed the presence of C-C/C=C, C=N and C=N bonds in the a-CNxthin film. All the a-CNxthin films showed a response to different humidity with sensitivity between 60-70%. The a-CNxthin film deposited at RF 70 W power indicates the highest sensitivity due to carbon disorder and higher sp3C content.

Original languageIndonesian
Pages (from-to)1951-1958
Number of pages8
JournalSains Malaysiana
Volume46
Issue number10
DOIs
Publication statusPublished - 1 Oct 2017

Fingerprint

Humidity sensors
Chemical analysis
Quartz
Acoustic impedance
Graphite
Amorphous carbon
Silicon
Plasma enhanced chemical vapor deposition
Field emission
Surface morphology
Raman spectroscopy
Hydrogen
Atmospheric humidity
Nitrogen
Carbon
X ray photoelectron spectroscopy

Keywords

  • Carbon nitride
  • Cluster size
  • PECVD

ASJC Scopus subject areas

  • General

Cite this

Kesan kuasa frekuensi radio terhadap komposisi ikatan kimia filem nipis a-CNxsebagai pengesan kelembapan. / Aziz, Siti Aisyah Abd; Awang, Rozidawati.

In: Sains Malaysiana, Vol. 46, No. 10, 01.10.2017, p. 1951-1958.

Research output: Contribution to journalArticle

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