Influence of RF power in the growth of aluminium zinc oxide (AZO) thin films by RF sputtering

Mohammed Mannir Aliyu, Mohammed Aminul Islam, Qamar Huda, Sejedur Rahman, Nowshad Amin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Aluminium doped zinc oxide (AZO) is fast becoming an important thin film material for applications as transparent conducting oxide (TCO) in several thin film solar cells, smart windows and many devices using touch screen displays. This is due to its good electrical and optical characteristics as well as lower cost and good abundance. Although sputtering is the general method for industrial fabrication of this material, but film characteristics depend strongly on fabrication processes. Thus, optimal films are obtained by optimization of the deposition conditions. In this work, we investigated the effects of RF deposition power on AZO thin films. Samples of similar thicknesses were grown under similar conditions in an RF sputtering chamber at different RF powers. The samples were then characterized using FESEM, AFM, UV-Vis, XRD and Hall effect measurement tools. Results indicate that the surface morphology is slightly affected with larger grain sizes obtained at higher RF powers. Also the surface roughness, average transmittance, conductivity and deposition rate all increase with the RF power. The lowest as-deposited resistivity of 15.3×10-3 Ω/cm was obtained, at the highest RF power of 100 W. This film also have the highest values of carrier concentration, mobility and figure of merit of 4.24×1020 cm-3, 0.96 cm2/V and 0.27×10-3 Ω respectively. This work highlights the significance of RF power in the fabrication of good quality AZO thin films.

Original languageEnglish
Title of host publicationAdvanced Materials Research
PublisherTrans Tech Publications
Pages295-299
Number of pages5
Volume925
ISBN (Print)9783038350866
DOIs
Publication statusPublished - 2014
EventJoint International Conference on Nanoscience, Engineering and Management, BOND21 - Penang
Duration: 19 Aug 201321 Aug 2013

Publication series

NameAdvanced Materials Research
Volume925
ISSN (Print)10226680

Other

OtherJoint International Conference on Nanoscience, Engineering and Management, BOND21
CityPenang
Period19/8/1321/8/13

Fingerprint

Zinc oxide
Oxide films
Sputtering
Aluminum
Fabrication
Thin films
Touch screens
Hall effect
Deposition rates
Surface morphology
Carrier concentration
Surface roughness
Display devices
Oxides
Costs

Keywords

  • AZO
  • Resistivity
  • RF power
  • Sputtering
  • TCO
  • Thin films
  • Transmittance

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Aliyu, M. M., Islam, M. A., Huda, Q., Rahman, S., & Amin, N. (2014). Influence of RF power in the growth of aluminium zinc oxide (AZO) thin films by RF sputtering. In Advanced Materials Research (Vol. 925, pp. 295-299). (Advanced Materials Research; Vol. 925). Trans Tech Publications. https://doi.org/10.4028/www.scientific.net/AMR.925.295

Influence of RF power in the growth of aluminium zinc oxide (AZO) thin films by RF sputtering. / Aliyu, Mohammed Mannir; Islam, Mohammed Aminul; Huda, Qamar; Rahman, Sejedur; Amin, Nowshad.

Advanced Materials Research. Vol. 925 Trans Tech Publications, 2014. p. 295-299 (Advanced Materials Research; Vol. 925).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aliyu, MM, Islam, MA, Huda, Q, Rahman, S & Amin, N 2014, Influence of RF power in the growth of aluminium zinc oxide (AZO) thin films by RF sputtering. in Advanced Materials Research. vol. 925, Advanced Materials Research, vol. 925, Trans Tech Publications, pp. 295-299, Joint International Conference on Nanoscience, Engineering and Management, BOND21, Penang, 19/8/13. https://doi.org/10.4028/www.scientific.net/AMR.925.295
Aliyu MM, Islam MA, Huda Q, Rahman S, Amin N. Influence of RF power in the growth of aluminium zinc oxide (AZO) thin films by RF sputtering. In Advanced Materials Research. Vol. 925. Trans Tech Publications. 2014. p. 295-299. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.925.295
Aliyu, Mohammed Mannir ; Islam, Mohammed Aminul ; Huda, Qamar ; Rahman, Sejedur ; Amin, Nowshad. / Influence of RF power in the growth of aluminium zinc oxide (AZO) thin films by RF sputtering. Advanced Materials Research. Vol. 925 Trans Tech Publications, 2014. pp. 295-299 (Advanced Materials Research).
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