Influence of power and film thickness on the properties of Rf PECVD hydrogenated amorphous carbon films

Rozidawati Awang, Saadah A. Rahman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

wo sets of hydrogenated amorphous carbon (a-C:H) films were deposited with different thicknesses at rf powers of 15 W and 50 W by varying the deposition time from the rf discharge of pure methane using our home-built plasma enhanced chemical vapour deposition (PECVD) system. The growth rate, optical energy gap, bonded hydrogen and the sp2 content in the films were obtained from the optical transmission and Fourier transform infrared (FTIR) of the films. The growth rate, hydrogen content and optical energy gap were found to be strongly dependent on rf power. The higher rf power reduced hydrogen content in the film which resulted in increase in sp2 content in the film structure with increase in film thickness. The optical energy gap decreased with increase in film thickness for both the higher and lower rf power films.

Original languageEnglish
Title of host publicationAIP Conference Proceedings
Pages133-136
Number of pages4
Volume909
DOIs
Publication statusPublished - 2007
Externally publishedYes
EventSOLID STATE SCIENCE AND TECHNOLOGY: 2nd International Conference on Solid State Science and Technology 2006, ICSSST 2006 - Kuala Terengganu
Duration: 4 Sep 20066 Sep 2006

Other

OtherSOLID STATE SCIENCE AND TECHNOLOGY: 2nd International Conference on Solid State Science and Technology 2006, ICSSST 2006
CityKuala Terengganu
Period4/9/066/9/06

Fingerprint

film thickness
vapor deposition
carbon
hydrogen
methane

Keywords

  • PECVD and hydrogenated amorphous

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Influence of power and film thickness on the properties of Rf PECVD hydrogenated amorphous carbon films. / Awang, Rozidawati; Rahman, Saadah A.

AIP Conference Proceedings. Vol. 909 2007. p. 133-136.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Awang, R & Rahman, SA 2007, Influence of power and film thickness on the properties of Rf PECVD hydrogenated amorphous carbon films. in AIP Conference Proceedings. vol. 909, pp. 133-136, SOLID STATE SCIENCE AND TECHNOLOGY: 2nd International Conference on Solid State Science and Technology 2006, ICSSST 2006, Kuala Terengganu, 4/9/06. https://doi.org/10.1063/1.2739839
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