Influence of mixed convection in atmospheric pressure chemical vapor deposition of graphene growth

Fatin Bazilah Fauzi, Edhuan Ismail, Muhammad Naqib Osman, Muhammad Suffian Rosli, Ahmad Faris Ismail, Mohd Ambri Mohamed, Syed Noh Syed Abu Bakar, Mohd Hanafi Ani

Research output: Contribution to journalConference article

Abstract

Chemical vapor deposition (CVD) is a well-known process as the most favourable for high-quality large area graphene production. However, it is a complex method where each parameter will contribute to significant effect on the deposition process. One of them, fluid dynamics, was reported to be one of the major governing factors for better deposition. Heat transfer process at high temperature will influence gas phase dynamics during the deposition process. In this study, the influence of mixed convection in atmospheric pressure CVD (APCVD) on the graphene quality has been systematically investigated. Reynolds number was calculated to identify the gas flow regime as well as to see its effects on the graphene quality. Then, the type of dominant convection inside the reactor was determined using Richardson number (Grashof number/Reynolds number squared). Changes in graphene quality were then observed by Raman spectra at various values of Reynolds and Richardson numbers. Additionally, computational fluid dynamics (CFD) calculations were also performed to observe the temperature and velocity contour during deposition. We then discuss the vital thermal-fluid dynamic characteristics required for an optimal graphene growth. We highlighted that a force convection in APCVD was vital for better quality of graphene.

Original languageEnglish
Pages (from-to)638-645
Number of pages8
JournalMaterials Today: Proceedings
Volume7
DOIs
Publication statusPublished - 1 Jan 2019
Event2018 Nanotech Malaysia - Kuala Lumpur, Malaysia
Duration: 7 May 20189 May 2018

Fingerprint

Mixed convection
Graphite
Graphene
Atmospheric pressure
Chemical vapor deposition
Fluid dynamics
Reynolds number
Grashof number
Flow of gases
Raman scattering
Computational fluid dynamics
Gases
Heat transfer
Temperature

Keywords

  • APCVD
  • CFD
  • Graphene
  • Heat transfer
  • Mixed convection

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Influence of mixed convection in atmospheric pressure chemical vapor deposition of graphene growth. / Fauzi, Fatin Bazilah; Ismail, Edhuan; Osman, Muhammad Naqib; Rosli, Muhammad Suffian; Ismail, Ahmad Faris; Mohamed, Mohd Ambri; Bakar, Syed Noh Syed Abu; Ani, Mohd Hanafi.

In: Materials Today: Proceedings, Vol. 7, 01.01.2019, p. 638-645.

Research output: Contribution to journalConference article

Fauzi, Fatin Bazilah ; Ismail, Edhuan ; Osman, Muhammad Naqib ; Rosli, Muhammad Suffian ; Ismail, Ahmad Faris ; Mohamed, Mohd Ambri ; Bakar, Syed Noh Syed Abu ; Ani, Mohd Hanafi. / Influence of mixed convection in atmospheric pressure chemical vapor deposition of graphene growth. In: Materials Today: Proceedings. 2019 ; Vol. 7. pp. 638-645.
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