Influence of humidity conditions on the capacitive and resistive response of an Al/VOPc/Pt co-planar humidity sensor

Fakhra Aziz, M. Hassan Sayyad, K. Sulaiman, Burhanuddin Yeop Majlis, Khassan S. Karimov, Zubair Ahmad, G. Sugandi

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

The fabrication and characterization of a novel co-planar humidity sensor based on organic semiconducting material, vanadyl phthalocyanine (VOPc), is presented in this paper. Here we examine the effect of different humidity conditions on the capacitive and resistive response of VOPc thin films in the Al/VOPc/Pt co-planar structure. The two asymmetric electrodes, aluminum (Al) and platinum (Pt), were deposited through the photolithography technique. Thin films of VOPc were spun-cast on the glass substrate with primarily deposited asymmetric metal electrodes, from a solution of 30 mg ml -1 in chloroform at 3000 rpm. The gap between the electrodes was 17 νm. A 100-fold increase was observed in the capacitance of the VOPc sensing material with an elevation of relative humidity level. The resistance of the sensor reduced from 2.9 GΩ to 2.1 MΩ with increasing level of humidity. The VOPc thin film has been analyzed by x-ray diffraction as well as atomic force microscopy in order to get structural and morphological information on the sample. Adequate sensing properties such as enough sensitivity, good selectivity, linearity and reasonable response and recovery times have been obtained. The humidity-dependent properties of the sensor make it a good match for its potential application in commercial hygrometers.

Original languageEnglish
Article number014001
JournalMeasurement Science and Technology
Volume23
Issue number1
DOIs
Publication statusPublished - Jan 2012

Fingerprint

Humidity sensors
Coplanar
Platinum
Humidity
Aluminum
humidity
Atmospheric humidity
platinum
Electrode
aluminum
Thin Films
Sensor
sensors
Thin films
Electrodes
Sensing
Hygrometers
electrodes
Phthalocyanine
thin films

Keywords

  • Atomic force microscopy
  • humidity sensor
  • photolithography
  • vanadyl phthalocyanine
  • x-ray diffraction

ASJC Scopus subject areas

  • Applied Mathematics
  • Instrumentation

Cite this

Influence of humidity conditions on the capacitive and resistive response of an Al/VOPc/Pt co-planar humidity sensor. / Aziz, Fakhra; Hassan Sayyad, M.; Sulaiman, K.; Yeop Majlis, Burhanuddin; Karimov, Khassan S.; Ahmad, Zubair; Sugandi, G.

In: Measurement Science and Technology, Vol. 23, No. 1, 014001, 01.2012.

Research output: Contribution to journalArticle

Aziz, Fakhra ; Hassan Sayyad, M. ; Sulaiman, K. ; Yeop Majlis, Burhanuddin ; Karimov, Khassan S. ; Ahmad, Zubair ; Sugandi, G. / Influence of humidity conditions on the capacitive and resistive response of an Al/VOPc/Pt co-planar humidity sensor. In: Measurement Science and Technology. 2012 ; Vol. 23, No. 1.
@article{f247a424c6bf434eb05cc6db8594b157,
title = "Influence of humidity conditions on the capacitive and resistive response of an Al/VOPc/Pt co-planar humidity sensor",
abstract = "The fabrication and characterization of a novel co-planar humidity sensor based on organic semiconducting material, vanadyl phthalocyanine (VOPc), is presented in this paper. Here we examine the effect of different humidity conditions on the capacitive and resistive response of VOPc thin films in the Al/VOPc/Pt co-planar structure. The two asymmetric electrodes, aluminum (Al) and platinum (Pt), were deposited through the photolithography technique. Thin films of VOPc were spun-cast on the glass substrate with primarily deposited asymmetric metal electrodes, from a solution of 30 mg ml -1 in chloroform at 3000 rpm. The gap between the electrodes was 17 νm. A 100-fold increase was observed in the capacitance of the VOPc sensing material with an elevation of relative humidity level. The resistance of the sensor reduced from 2.9 GΩ to 2.1 MΩ with increasing level of humidity. The VOPc thin film has been analyzed by x-ray diffraction as well as atomic force microscopy in order to get structural and morphological information on the sample. Adequate sensing properties such as enough sensitivity, good selectivity, linearity and reasonable response and recovery times have been obtained. The humidity-dependent properties of the sensor make it a good match for its potential application in commercial hygrometers.",
keywords = "Atomic force microscopy, humidity sensor, photolithography, vanadyl phthalocyanine, x-ray diffraction",
author = "Fakhra Aziz and {Hassan Sayyad}, M. and K. Sulaiman and {Yeop Majlis}, Burhanuddin and Karimov, {Khassan S.} and Zubair Ahmad and G. Sugandi",
year = "2012",
month = "1",
doi = "10.1088/0957-0233/23/1/014001",
language = "English",
volume = "23",
journal = "Measurement Science and Technology",
issn = "0957-0233",
publisher = "IOP Publishing Ltd.",
number = "1",

}

TY - JOUR

T1 - Influence of humidity conditions on the capacitive and resistive response of an Al/VOPc/Pt co-planar humidity sensor

AU - Aziz, Fakhra

AU - Hassan Sayyad, M.

AU - Sulaiman, K.

AU - Yeop Majlis, Burhanuddin

AU - Karimov, Khassan S.

AU - Ahmad, Zubair

AU - Sugandi, G.

PY - 2012/1

Y1 - 2012/1

N2 - The fabrication and characterization of a novel co-planar humidity sensor based on organic semiconducting material, vanadyl phthalocyanine (VOPc), is presented in this paper. Here we examine the effect of different humidity conditions on the capacitive and resistive response of VOPc thin films in the Al/VOPc/Pt co-planar structure. The two asymmetric electrodes, aluminum (Al) and platinum (Pt), were deposited through the photolithography technique. Thin films of VOPc were spun-cast on the glass substrate with primarily deposited asymmetric metal electrodes, from a solution of 30 mg ml -1 in chloroform at 3000 rpm. The gap between the electrodes was 17 νm. A 100-fold increase was observed in the capacitance of the VOPc sensing material with an elevation of relative humidity level. The resistance of the sensor reduced from 2.9 GΩ to 2.1 MΩ with increasing level of humidity. The VOPc thin film has been analyzed by x-ray diffraction as well as atomic force microscopy in order to get structural and morphological information on the sample. Adequate sensing properties such as enough sensitivity, good selectivity, linearity and reasonable response and recovery times have been obtained. The humidity-dependent properties of the sensor make it a good match for its potential application in commercial hygrometers.

AB - The fabrication and characterization of a novel co-planar humidity sensor based on organic semiconducting material, vanadyl phthalocyanine (VOPc), is presented in this paper. Here we examine the effect of different humidity conditions on the capacitive and resistive response of VOPc thin films in the Al/VOPc/Pt co-planar structure. The two asymmetric electrodes, aluminum (Al) and platinum (Pt), were deposited through the photolithography technique. Thin films of VOPc were spun-cast on the glass substrate with primarily deposited asymmetric metal electrodes, from a solution of 30 mg ml -1 in chloroform at 3000 rpm. The gap between the electrodes was 17 νm. A 100-fold increase was observed in the capacitance of the VOPc sensing material with an elevation of relative humidity level. The resistance of the sensor reduced from 2.9 GΩ to 2.1 MΩ with increasing level of humidity. The VOPc thin film has been analyzed by x-ray diffraction as well as atomic force microscopy in order to get structural and morphological information on the sample. Adequate sensing properties such as enough sensitivity, good selectivity, linearity and reasonable response and recovery times have been obtained. The humidity-dependent properties of the sensor make it a good match for its potential application in commercial hygrometers.

KW - Atomic force microscopy

KW - humidity sensor

KW - photolithography

KW - vanadyl phthalocyanine

KW - x-ray diffraction

UR - http://www.scopus.com/inward/record.url?scp=84855364153&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84855364153&partnerID=8YFLogxK

U2 - 10.1088/0957-0233/23/1/014001

DO - 10.1088/0957-0233/23/1/014001

M3 - Article

AN - SCOPUS:84855364153

VL - 23

JO - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

IS - 1

M1 - 014001

ER -