Influence of deposition time on the chemical bonding and composition of amorphous carbon nitride films

Nurul Izzati Azman, Rozidawati Awang, Shafarina Azlinda Ahmad Kamal

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Amorphous carbon nitride (a-CNx) films have been deposited using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) under various deposition times. The effects on chemical bonding and composition of this film were characterized by using Fourier Transform Infrared Spectroscopy (FTIR) and Energy Dispersive X-Rays Spectroscopy (EDX) respectively. The spectrum shows several band that exist in this film such as CN (1020-1280 cm-1), C=C (1300-1500 cm-1), C=N (1500-1800 cm-1), C≡N (2000 - 2300 cm-1), C-H (2800-3000 cm- 1), and N-H/O-H (3300-3500 cm-1). The longer deposition time allows the increase in occurrences of breaking the C-N bonds which results in the decrease in nitrogen content.

Original languageEnglish
Title of host publication2014 UKM FST Postgraduate Colloquium - Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2014 Postgraduate Colloquium
EditorsZahari Ibrahim, Haja Maideen Kader Maideen, Nazlina Ibrahim, Nurul Huda Abd Karim, Taufik Yusof, Fatimah Abdul Razak, Nurulkamal Maseran, Rozida Mohd Khalid, Noor Baa'yah Ibrahim, Hasidah Mohd. Sidek, Mohd Salmi Md Noorani, Norbert Simon
PublisherAmerican Institute of Physics Inc.
Pages74-77
Number of pages4
ISBN (Electronic)9780735412507
DOIs
Publication statusPublished - 1 Jan 2014
Event2014 Postgraduate Colloquium of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology, UKM FST 2014 - Selangor, Malaysia
Duration: 9 Apr 201411 Apr 2014

Publication series

NameAIP Conference Proceedings
Volume1614
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other2014 Postgraduate Colloquium of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology, UKM FST 2014
CountryMalaysia
CitySelangor
Period9/4/1411/4/14

Fingerprint

carbon nitrides
radio frequencies
infrared spectroscopy
vapor deposition
occurrences
nitrogen
spectroscopy
x rays
energy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Azman, N. I., Awang, R., & Kamal, S. A. A. (2014). Influence of deposition time on the chemical bonding and composition of amorphous carbon nitride films. In Z. Ibrahim, H. M. K. Maideen, N. Ibrahim, N. H. A. Karim, T. Yusof, F. A. Razak, N. Maseran, R. M. Khalid, N. B. Ibrahim, H. M. Sidek, M. S. M. Noorani, ... N. Simon (Eds.), 2014 UKM FST Postgraduate Colloquium - Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2014 Postgraduate Colloquium (pp. 74-77). (AIP Conference Proceedings; Vol. 1614). American Institute of Physics Inc.. https://doi.org/10.1063/1.4895174

Influence of deposition time on the chemical bonding and composition of amorphous carbon nitride films. / Azman, Nurul Izzati; Awang, Rozidawati; Kamal, Shafarina Azlinda Ahmad.

2014 UKM FST Postgraduate Colloquium - Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2014 Postgraduate Colloquium. ed. / Zahari Ibrahim; Haja Maideen Kader Maideen; Nazlina Ibrahim; Nurul Huda Abd Karim; Taufik Yusof; Fatimah Abdul Razak; Nurulkamal Maseran; Rozida Mohd Khalid; Noor Baa'yah Ibrahim; Hasidah Mohd. Sidek; Mohd Salmi Md Noorani; Norbert Simon. American Institute of Physics Inc., 2014. p. 74-77 (AIP Conference Proceedings; Vol. 1614).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Azman, NI, Awang, R & Kamal, SAA 2014, Influence of deposition time on the chemical bonding and composition of amorphous carbon nitride films. in Z Ibrahim, HMK Maideen, N Ibrahim, NHA Karim, T Yusof, FA Razak, N Maseran, RM Khalid, NB Ibrahim, HM Sidek, MSM Noorani & N Simon (eds), 2014 UKM FST Postgraduate Colloquium - Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2014 Postgraduate Colloquium. AIP Conference Proceedings, vol. 1614, American Institute of Physics Inc., pp. 74-77, 2014 Postgraduate Colloquium of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology, UKM FST 2014, Selangor, Malaysia, 9/4/14. https://doi.org/10.1063/1.4895174
Azman NI, Awang R, Kamal SAA. Influence of deposition time on the chemical bonding and composition of amorphous carbon nitride films. In Ibrahim Z, Maideen HMK, Ibrahim N, Karim NHA, Yusof T, Razak FA, Maseran N, Khalid RM, Ibrahim NB, Sidek HM, Noorani MSM, Simon N, editors, 2014 UKM FST Postgraduate Colloquium - Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2014 Postgraduate Colloquium. American Institute of Physics Inc. 2014. p. 74-77. (AIP Conference Proceedings). https://doi.org/10.1063/1.4895174
Azman, Nurul Izzati ; Awang, Rozidawati ; Kamal, Shafarina Azlinda Ahmad. / Influence of deposition time on the chemical bonding and composition of amorphous carbon nitride films. 2014 UKM FST Postgraduate Colloquium - Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2014 Postgraduate Colloquium. editor / Zahari Ibrahim ; Haja Maideen Kader Maideen ; Nazlina Ibrahim ; Nurul Huda Abd Karim ; Taufik Yusof ; Fatimah Abdul Razak ; Nurulkamal Maseran ; Rozida Mohd Khalid ; Noor Baa'yah Ibrahim ; Hasidah Mohd. Sidek ; Mohd Salmi Md Noorani ; Norbert Simon. American Institute of Physics Inc., 2014. pp. 74-77 (AIP Conference Proceedings).
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