Influence of deposition time on the bonding and morphology of amorphous carbon nitride thin films

Rozidawati Awang, Nurul Izzati Azman, Noorain Purhanudin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Amorphous carbon nitride (a-CNx) is a well-known material that can be used in various applications such as coating for hard disk, wear resistant, humidity sensor and others. In this research, a-CNx thin films have been deposited by using radio frequency-plasma enhanced chemical vapor deposition (RF-PECVD) with the mixing of pure methane (CH4) and nitrogen (N2). The gas ratio of CH4/N2, electrode distance, pressure and temperature of deposition is kept constant while deposition time is allowed to vary from 30 to 150 minutes. Raman spectroscopy and field emission scanning electron microscopy (FESEM) have been used to study the bonding and morphology of these films respectively. An increase in deposition time resulted with thedecrease in sp2 content in the a-CNx thin films. Theincrease in the Id/Ig intensity ratio with the increase in deposition time can be explained by the reducing size of graphitic cluster. Long deposition time retarded the growth rate of a-CNx thin films due to etching effects. Longer exposure to the etching effect resultingin the creation of small graphitic cluster with the formation of spongy-like porous features.

Original languageEnglish
Title of host publicationMaterials Science Forum
PublisherTrans Tech Publications Ltd
Pages657-662
Number of pages6
Volume846
ISBN (Print)9783038357520
DOIs
Publication statusPublished - 2016
Event28th Regional Conference on Solid State Science and Technology, RCSSST 2014 - Cameron Highlands, Pahang, Malaysia
Duration: 25 Nov 201427 Nov 2014

Publication series

NameMaterials Science Forum
Volume846
ISSN (Print)02555476

Other

Other28th Regional Conference on Solid State Science and Technology, RCSSST 2014
CountryMalaysia
CityCameron Highlands, Pahang
Period25/11/1427/11/14

Fingerprint

carbon nitrides
Carbon nitride
Amorphous carbon
Thin films
thin films
Etching
etching
Humidity sensors
Hard disk storage
Methane
Plasma enhanced chemical vapor deposition
Field emission
Raman spectroscopy
humidity
field emission
radio frequencies
Nitrogen
methane
Gases
Wear of materials

Keywords

  • FESEM
  • PECVD
  • Raman spectroscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Awang, R., Azman, N. I., & Purhanudin, N. (2016). Influence of deposition time on the bonding and morphology of amorphous carbon nitride thin films. In Materials Science Forum (Vol. 846, pp. 657-662). (Materials Science Forum; Vol. 846). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.846.657

Influence of deposition time on the bonding and morphology of amorphous carbon nitride thin films. / Awang, Rozidawati; Azman, Nurul Izzati; Purhanudin, Noorain.

Materials Science Forum. Vol. 846 Trans Tech Publications Ltd, 2016. p. 657-662 (Materials Science Forum; Vol. 846).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Awang, R, Azman, NI & Purhanudin, N 2016, Influence of deposition time on the bonding and morphology of amorphous carbon nitride thin films. in Materials Science Forum. vol. 846, Materials Science Forum, vol. 846, Trans Tech Publications Ltd, pp. 657-662, 28th Regional Conference on Solid State Science and Technology, RCSSST 2014, Cameron Highlands, Pahang, Malaysia, 25/11/14. https://doi.org/10.4028/www.scientific.net/MSF.846.657
Awang R, Azman NI, Purhanudin N. Influence of deposition time on the bonding and morphology of amorphous carbon nitride thin films. In Materials Science Forum. Vol. 846. Trans Tech Publications Ltd. 2016. p. 657-662. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.846.657
Awang, Rozidawati ; Azman, Nurul Izzati ; Purhanudin, Noorain. / Influence of deposition time on the bonding and morphology of amorphous carbon nitride thin films. Materials Science Forum. Vol. 846 Trans Tech Publications Ltd, 2016. pp. 657-662 (Materials Science Forum).
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