Inductively-tuned K-band distributed MEMS phase shifter

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a new method in the MEMS phase shifters using inductors and inline MEMS bridges. There is LC serial and parallel configuration in the un-actuated and actuated position respectively. The resonance frequencies due to these configurations causes an increasing in impedance change and then increasing in the phase shift in the K- band frequency range. For a unit cell at 20 GHz the Un-actuated simulation results in a reflection coefficient -26.5dB, an insertion loss of-0.185dB and the phase constant of -23.5 degree. The actuated simulation results in a reflection coefficient -13.5dB, an insertion loss of -0.18dB and the phase constant of -6 degree. The spacing in the proposed structures is S=250e-6. This spacing is smaller than similar phase shifters using only capacitors at 20GHz. Then the governing equations for the impedance, Bragg frequency and the periodic spacing between the bridges are derived.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages208-212
Number of pages5
DOIs
Publication statusPublished - 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur
Duration: 29 Nov 20061 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CityKuala Lumpur
Period29/11/061/12/06

Fingerprint

Phase shifters
Insertion losses
MEMS
Phase shift
Frequency bands
Capacitors

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Afrang, S., & Yeop Majlis, B. (2006). Inductively-tuned K-band distributed MEMS phase shifter. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 208-212). [4266599] https://doi.org/10.1109/SMELEC.2006.381049

Inductively-tuned K-band distributed MEMS phase shifter. / Afrang, Saeid; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 208-212 4266599.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Afrang, S & Yeop Majlis, B 2006, Inductively-tuned K-band distributed MEMS phase shifter. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4266599, pp. 208-212, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381049
Afrang S, Yeop Majlis B. Inductively-tuned K-band distributed MEMS phase shifter. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 208-212. 4266599 https://doi.org/10.1109/SMELEC.2006.381049
Afrang, Saeid ; Yeop Majlis, Burhanuddin. / Inductively-tuned K-band distributed MEMS phase shifter. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. pp. 208-212
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