Implementation of ZnO nanorods as sensing elements for a surface acoustic wave sensor

Chang Fu Dee, Kean C. Aw, Bryon Wright, Xiaodong Yan, Chongwen Zou, Wei Gao, Muhamad Mat Salleh, Burhanuddin Yeop Majlis, Jong Duk Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The limited sensitivity of thinfilm based sensors has motivated the search for sensing structures and materials with greater sensing performance. Although thinfilm based SAW devices have been used as force, pressure, chemical and gas sensors so far. It is limited by the exposed sensing surface of the thinfilm. A feasibility study has been done by implementing the ZnO nanorods (NRs) to enhance the device sensitivity by greatly increase the exposed sensing surface. The implementation of these ZnO NRs as sensing elements is expected to enhance the sensing power due to the large surface to volume ratio. The sensing mechanism in this design is by detecting the minute change of seismic mass for ZnO NRs using surface acoustic wave before and after the attachment of reacting chemical liquid and gas substance.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages563-567
Number of pages5
Volume663-665
DOIs
Publication statusPublished - 2011
Event2010 International Conference on Optical, Electronic and Electrical Materials, OEEM2010 - Kunming
Duration: 1 Aug 20104 Aug 2010

Publication series

NameMaterials Science Forum
Volume663-665
ISSN (Print)02555476

Other

Other2010 International Conference on Optical, Electronic and Electrical Materials, OEEM2010
CityKunming
Period1/8/104/8/10

Fingerprint

Nanorods
Surface waves
nanorods
Acoustic waves
Chemical sensors
acoustics
sensors
Sensors
Pressure sensors
Gases
Liquids
pressure sensors
gases
attachment
sensitivity
liquids

Keywords

  • Interdigital electrodes
  • Surface acoustic wave sensors
  • ZnO nanorods

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Dee, C. F., Aw, K. C., Wright, B., Yan, X., Zou, C., Gao, W., ... Lee, J. D. (2011). Implementation of ZnO nanorods as sensing elements for a surface acoustic wave sensor. In Materials Science Forum (Vol. 663-665, pp. 563-567). (Materials Science Forum; Vol. 663-665). https://doi.org/10.4028/www.scientific.net/MSF.663-665.563

Implementation of ZnO nanorods as sensing elements for a surface acoustic wave sensor. / Dee, Chang Fu; Aw, Kean C.; Wright, Bryon; Yan, Xiaodong; Zou, Chongwen; Gao, Wei; Mat Salleh, Muhamad; Yeop Majlis, Burhanuddin; Lee, Jong Duk.

Materials Science Forum. Vol. 663-665 2011. p. 563-567 (Materials Science Forum; Vol. 663-665).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dee, CF, Aw, KC, Wright, B, Yan, X, Zou, C, Gao, W, Mat Salleh, M, Yeop Majlis, B & Lee, JD 2011, Implementation of ZnO nanorods as sensing elements for a surface acoustic wave sensor. in Materials Science Forum. vol. 663-665, Materials Science Forum, vol. 663-665, pp. 563-567, 2010 International Conference on Optical, Electronic and Electrical Materials, OEEM2010, Kunming, 1/8/10. https://doi.org/10.4028/www.scientific.net/MSF.663-665.563
Dee CF, Aw KC, Wright B, Yan X, Zou C, Gao W et al. Implementation of ZnO nanorods as sensing elements for a surface acoustic wave sensor. In Materials Science Forum. Vol. 663-665. 2011. p. 563-567. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.663-665.563
Dee, Chang Fu ; Aw, Kean C. ; Wright, Bryon ; Yan, Xiaodong ; Zou, Chongwen ; Gao, Wei ; Mat Salleh, Muhamad ; Yeop Majlis, Burhanuddin ; Lee, Jong Duk. / Implementation of ZnO nanorods as sensing elements for a surface acoustic wave sensor. Materials Science Forum. Vol. 663-665 2011. pp. 563-567 (Materials Science Forum).
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