Impact of oxygen-permeable mold on fabrication of microchannels with ultraviolet curable materials

Jafar Alvankarian, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

Abstract

In this work, effect of oxygen diffusion on curing of materials which are sensitive to ultra violet light (UV) in fabrication of microchannels using micromolds with oxygen permeability is investigated. The effects of physical boundary conditions of mold on microfabrication of polymeric arrays of high aspect-ratio microchannels in presence of oxygen inhibition and under variable UV intensity and dose are studied analytically and experimentally. Polydimethylsiloxane (PDMS) as the oxygen-permeable material and polyurethane methacrylate (PUMA) as the UV-curable substrate are selected for experiments. It is shown that for a wide range of exposure intensity and dose, a thin layer of PUMA resin with thickness of a few micrometers in contact with the mold remains uncured and inhibited by high concentration of oxygen molecules while the overall curing rate is reduced by about tenfold for PDMS compared to impermeable silicon mold. The direct impact of presence of high concentration of oxygen in both of mold and resin during UV curing and due to insufficient exposure dose and intensity is a considerable alteration in geometries of manufactured microstructures. The obtained results are crucial for method of use of micromolding and evaluation of fidelity of the replicated microstructures with the proposed design in terms of verticality of the walls and details of the transferring patterns that are important to microfluidic applications.

Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalMicrosystem Technologies
DOIs
Publication statusAccepted/In press - 8 Mar 2016

Fingerprint

microchannels
Microchannels
Oxygen
Fabrication
ultraviolet radiation
fabrication
oxygen
curing
Curing
Polyurethanes
Methacrylates
Polydimethylsiloxane
dosage
polyurethane resins
Resins
acrylic resins
microstructure
Microstructure
Microfabrication
Silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Impact of oxygen-permeable mold on fabrication of microchannels with ultraviolet curable materials. / Alvankarian, Jafar; Yeop Majlis, Burhanuddin.

In: Microsystem Technologies, 08.03.2016, p. 1-8.

Research output: Contribution to journalArticle

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