Hybrid simulation approach on MEMS piezoresistive microcantilever sensor for biosensing applications

Rosminazuin Ab Rahim, Badariah Bais, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper uses a hybrid simulation approach in CoventorWare design environment which combines finite element analysis and circuit simulation modeling to obtain the optimal performance of piezoresistive microcantilever sensor. A 250 μm x 100 μm x 1 μm SiO2 cantilever integrated with 0.2 μm thick Si piezoresistor were used in this study. A finite element analysis on piezoresistive microcantilever sensor was conducted in CoventorWare Analyzer environment which incorporates MemMech and MemPZR modules. The sensor sensitivity was obtained by measuring resistivity changes in piezoresistive material in response to surface stress changes of microcantilever. The simulation results were later integrated with system-level simulation solver called Architect to enable the optimization of the sensor circuit output. It involves a hybrid approach which uniquely combined FEM analysis and piezoresistive modeling using circuit simulation environment which results in optimal performance of MEMS piezoresistive microcantilever sensor.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages283-286
Number of pages4
Volume74
DOIs
Publication statusPublished - 2009
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore
Duration: 28 Jun 20093 Jul 2009

Publication series

NameAdvanced Materials Research
Volume74
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT 2009
CitySingpore
Period28/6/093/7/09

Fingerprint

MEMS
Sensors
Circuit simulation
Finite element method
Networks (circuits)
Computer simulation

Keywords

  • Biosensor
  • Cantilever
  • MEMS
  • Piezoresistor

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Hybrid simulation approach on MEMS piezoresistive microcantilever sensor for biosensing applications. / Rahim, Rosminazuin Ab; Bais, Badariah; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 74 2009. p. 283-286 (Advanced Materials Research; Vol. 74).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rahim, RA, Bais, B & Yeop Majlis, B 2009, Hybrid simulation approach on MEMS piezoresistive microcantilever sensor for biosensing applications. in Advanced Materials Research. vol. 74, Advanced Materials Research, vol. 74, pp. 283-286, International Conference on Materials for Advanced Technologies, ICMAT 2009, Singpore, 28/6/09. https://doi.org/10.4028/www.scientific.net/AMR.74.283
Rahim, Rosminazuin Ab ; Bais, Badariah ; Yeop Majlis, Burhanuddin. / Hybrid simulation approach on MEMS piezoresistive microcantilever sensor for biosensing applications. Advanced Materials Research. Vol. 74 2009. pp. 283-286 (Advanced Materials Research).
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