High sensitivity and small size MEMS capacitive microphone using a novel slotted diaphragm

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. The behaviors of the microphones with clamped and slotted diaphragms are analyzed using the finite element method (FEM). According to the results, a clamped microphone with a 2.43 × 2.43 mm2 diaphragm and a slotted one with a 1.5 × 1.5 mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33 × 10-6 pF/Pa for the clamped and 3.87 × 10 -5 pF/Pa for the slotted microphone with a 0.5 × 0.5 mm 2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The pull-in voltage of the clamped microphone is 105 V, and slotted one is 49 V. The pull-in voltage of the slotted microphone is about 53% decreased.

Original languageEnglish
Pages (from-to)1401-1406
Number of pages6
JournalMicrosystem Technologies
Volume15
Issue number9
DOIs
Publication statusPublished - Sep 2009
Externally publishedYes

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diaphragms
Microphones
Diaphragms
microphones
microelectromechanical systems
MEMS
sensitivity
clamped structures
Electric potential
electric potential
stiffness
finite element method
chips
Stiffness
Acoustic waves
Finite element method
acoustics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

High sensitivity and small size MEMS capacitive microphone using a novel slotted diaphragm. / Ganji, Bahram Azizollah; Yeop Majlis, Burhanuddin.

In: Microsystem Technologies, Vol. 15, No. 9, 09.2009, p. 1401-1406.

Research output: Contribution to journalArticle

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