High-frequency analysis on surface micromachined on-chip transformers with stacked interwinding coil structures

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Abstract

On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.

Original languageEnglish
Article number125009
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number12
DOIs
Publication statusPublished - 1 Dec 2008

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MEMS
Metals
Surface micromachining
Silicon
Capacitance
Fabrication
Glass
Substrates
Costs

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

Cite this

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title = "High-frequency analysis on surface micromachined on-chip transformers with stacked interwinding coil structures",
abstract = "On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.",
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AB - On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.

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