Helium-dilution effects on thermophysical properties of hydrogenated amorphous carbon thin-films

Yun Young Kim, Rozidawati Awang, Sridhar Krishnaswamy, Hasan Adli Alwi

Research output: Contribution to journalArticle

Abstract

Thermophysical properties of hydrogenated amorphous carbon thin-films were characterized in the present investigation. Samples were deposited in a direct current plasma enhanced chemical vapor deposition (DC PECVD) system from the discharge of methane (CH4) mixed with helium (He). 5 different films were fabricated with He-to-CH4 flow-rate ratios of 1:1, 2:1, 3:1, 4:1 and 5:1 in order to clarify the dependence of thermal diffusivity (α) on the microstructural changes due to the He-dilution effect. Using an ultrafast optical pump-probe technique, time-domain thermoreflectance signals were collected and the thermal property was extracted using the Paddock and Eesley model (1986). Results show strong correlation of α to the changes of sp2 carbon cluster determined by spectroscopic measurements.

Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalDiamond and Related Materials
Volume32
DOIs
Publication statusPublished - 2013

Fingerprint

Helium
Carbon films
Amorphous carbon
thermophysical properties
Dilution
dilution
Thermodynamic properties
helium
Thin films
carbon
thin films
Carbon clusters
Thermal diffusivity
Methane
thermal diffusivity
Plasma enhanced chemical vapor deposition
methane
flow velocity
thermodynamic properties
direct current

Keywords

  • Amorphous hydrogenated carbon
  • Chemical vapor deposition
  • Microstructure
  • Thermal properties

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Chemistry(all)

Cite this

Helium-dilution effects on thermophysical properties of hydrogenated amorphous carbon thin-films. / Kim, Yun Young; Awang, Rozidawati; Krishnaswamy, Sridhar; Alwi, Hasan Adli.

In: Diamond and Related Materials, Vol. 32, 2013, p. 1-6.

Research output: Contribution to journalArticle

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