Growth time dependent of high quality graphene on interdigital electrodes for MEMS supercapacitor

Hafzaliza Erny Zainal Abidin, Azrul Azlan Hamzah, Mohd Ambri Mohamed, Burhanuddin Yeop Majlis, Reena Sri Selvarajan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper discusses direct growth of graphene on the interdigital electrodes for MEMS supercapacitor application. In addition, a high quality graphene was grown by using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) at temperature of 1000°C at various deposition time from 2-10 minutes at fixed power of 40 Watt. The graphene growth structure on the interdigital electrodes was characterized by Raman spectroscopy and atomic force microscopy (AFM). Raman spectra indicate that the intensity ratio of the 2D band and G band (I2d/Ig) is 1.00 and the value of FWHM is 54.26 cm-1 which produced a good quality bilayer graphene. Atomic Force Microscopy (AFM) result shows the surface roughness of the structure is 68.56nm.

Original languageEnglish
Title of host publicationProceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages108-111
Number of pages4
ISBN (Electronic)9781509040285
DOIs
Publication statusPublished - 16 Oct 2017
Event11th IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017 - Batu Ferringhi, Penang, Malaysia
Duration: 23 Aug 201725 Aug 2017

Other

Other11th IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017
CountryMalaysia
CityBatu Ferringhi, Penang
Period23/8/1725/8/17

Fingerprint

electrochemical capacitors
Graphene
microelectromechanical systems
MEMS
graphene
Electrodes
electrodes
Atomic force microscopy
atomic force microscopy
Plasma enhanced chemical vapor deposition
Full width at half maximum
Raman spectroscopy
Raman scattering
radio frequencies
surface roughness
Surface roughness
vapor deposition
Raman spectra
Supercapacitor
Temperature

Keywords

  • bilayer graphene
  • graphene growth
  • MEMS supercapacitor
  • PECVD
  • Raman Spectroscopy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation
  • Biomedical Engineering

Cite this

Abidin, H. E. Z., Hamzah, A. A., Mohamed, M. A., Yeop Majlis, B., & Selvarajan, R. S. (2017). Growth time dependent of high quality graphene on interdigital electrodes for MEMS supercapacitor. In Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017 (pp. 108-111). [8069153] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/RSM.2017.8069153

Growth time dependent of high quality graphene on interdigital electrodes for MEMS supercapacitor. / Abidin, Hafzaliza Erny Zainal; Hamzah, Azrul Azlan; Mohamed, Mohd Ambri; Yeop Majlis, Burhanuddin; Selvarajan, Reena Sri.

Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 108-111 8069153.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abidin, HEZ, Hamzah, AA, Mohamed, MA, Yeop Majlis, B & Selvarajan, RS 2017, Growth time dependent of high quality graphene on interdigital electrodes for MEMS supercapacitor. in Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017., 8069153, Institute of Electrical and Electronics Engineers Inc., pp. 108-111, 11th IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017, Batu Ferringhi, Penang, Malaysia, 23/8/17. https://doi.org/10.1109/RSM.2017.8069153
Abidin HEZ, Hamzah AA, Mohamed MA, Yeop Majlis B, Selvarajan RS. Growth time dependent of high quality graphene on interdigital electrodes for MEMS supercapacitor. In Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 108-111. 8069153 https://doi.org/10.1109/RSM.2017.8069153
Abidin, Hafzaliza Erny Zainal ; Hamzah, Azrul Azlan ; Mohamed, Mohd Ambri ; Yeop Majlis, Burhanuddin ; Selvarajan, Reena Sri. / Growth time dependent of high quality graphene on interdigital electrodes for MEMS supercapacitor. Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 108-111
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