Formation of chemical bonds and morphological studies of a-CNx

Effects of PECVD deposition pressure

Noorain Purhanudin, Rozidawati Awang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We report the structural difference and film properties of amorphous carbon nitride (a-CNx) thin films as a function of PECVD deposition pressure using precursor gases of ethane (C2H6) and nitrogen (N2). The Fourier transform infra-red (FTIR) spectra reveal peaks of single C-N (1100 cm-1), double C=C (1500 cm-1), double C=N (1670 cm-1) and triple C≡N (2340 cm-1). A systematic change in the preferential peaks correspond to the C=N and C≡N triple bonds were found to increase as deposition pressure increased. Field emission scanning electron microscopy (FESEM) provides morphological structure of the film. From the samples prepare at low deposition pressure, the particles tend to agglomerate into clusters with non-homogenous grains distributed over the surface. Higher deposition pressure results in coalescence process of the film, reflecting the formation of grains evenly distributed on the film. The film morphology is increased in voids structure with increase in deposition pressure. Finally, the samples were successfully prepared by PECVD technique with deposition pressure in varied, and the effect of deposition pressure on the chemical bonding and the morphology of the films had been studied.

Original languageEnglish
Title of host publication2016 UKM FST Postgraduate Colloquium: Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2016 Postgraduate Colloquium
PublisherAmerican Institute of Physics Inc.
Volume1784
ISBN (Electronic)9780735414464
DOIs
Publication statusPublished - 17 Nov 2016
Event2016 Postgraduate Colloquium of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology, UKM FST 2016 - Selangor, Malaysia
Duration: 13 Apr 201614 Apr 2016

Other

Other2016 Postgraduate Colloquium of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology, UKM FST 2016
CountryMalaysia
CitySelangor
Period13/4/1614/4/16

Fingerprint

chemical bonds
carbon nitrides
ethane
coalescing
voids
field emission
infrared spectra
nitrogen
scanning electron microscopy
thin films
gases

Keywords

  • nitrile band
  • plasma reactions
  • void structure

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Purhanudin, N., & Awang, R. (2016). Formation of chemical bonds and morphological studies of a-CNx: Effects of PECVD deposition pressure. In 2016 UKM FST Postgraduate Colloquium: Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2016 Postgraduate Colloquium (Vol. 1784). [040018] American Institute of Physics Inc.. https://doi.org/10.1063/1.4966804

Formation of chemical bonds and morphological studies of a-CNx : Effects of PECVD deposition pressure. / Purhanudin, Noorain; Awang, Rozidawati.

2016 UKM FST Postgraduate Colloquium: Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2016 Postgraduate Colloquium. Vol. 1784 American Institute of Physics Inc., 2016. 040018.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Purhanudin, N & Awang, R 2016, Formation of chemical bonds and morphological studies of a-CNx: Effects of PECVD deposition pressure. in 2016 UKM FST Postgraduate Colloquium: Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2016 Postgraduate Colloquium. vol. 1784, 040018, American Institute of Physics Inc., 2016 Postgraduate Colloquium of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology, UKM FST 2016, Selangor, Malaysia, 13/4/16. https://doi.org/10.1063/1.4966804
Purhanudin N, Awang R. Formation of chemical bonds and morphological studies of a-CNx: Effects of PECVD deposition pressure. In 2016 UKM FST Postgraduate Colloquium: Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2016 Postgraduate Colloquium. Vol. 1784. American Institute of Physics Inc. 2016. 040018 https://doi.org/10.1063/1.4966804
Purhanudin, Noorain ; Awang, Rozidawati. / Formation of chemical bonds and morphological studies of a-CNx : Effects of PECVD deposition pressure. 2016 UKM FST Postgraduate Colloquium: Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2016 Postgraduate Colloquium. Vol. 1784 American Institute of Physics Inc., 2016.
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