First resonance frequency and high sensitivity for MEMS acoustic sensors

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis, Saeed Rastegar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, the first resonance frequency of the clamped square diaphragm of the capacitive acoustic sensor has been calculated using variational iteration method (VIM). The equivalent electrical circuit model using lumped parameters has been used to obtain the sensitivity of the sensor. The aim is to develop the microphones with high sensitivity and flat frequency response in hearing range. The high sensitivity can be obtained by changing the initial stress of diaphragm, σr diaphragm size, a, diaphragm thickness, t, back plate thickness, h, air gap thickness, d, back plate hole radius, r, surface area fraction occupied by the holes, a., and bias voltage. The optimized structure has a diaphragm thickness of 0.8 μm, a diaphragm area of 2.43 mm2, an air gap of 4.0 μm and a 1.0 μm thick back plate with acoustical ports. The device shows maximum sensitivity 47.9mV/Pa, with a high frequency response extending to 18 kHz.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages239-244
Number of pages6
DOIs
Publication statusPublished - 2008
Event2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008 - Johor Bahru, Johor
Duration: 25 Nov 200827 Nov 2008

Other

Other2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008
CityJohor Bahru, Johor
Period25/11/0827/11/08

Fingerprint

Diaphragms
MEMS
Acoustics
Sensors
Frequency response
Audition
Microphones
Bias voltage
Air
Networks (circuits)

Keywords

  • Acoustic sensor
  • MEMS
  • Resonance frequency
  • Sensitivity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Ganji, B. A., Yeop Majlis, B., & Rastegar, S. (2008). First resonance frequency and high sensitivity for MEMS acoustic sensors. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 239-244). [4770315] https://doi.org/10.1109/SMELEC.2008.4770315

First resonance frequency and high sensitivity for MEMS acoustic sensors. / Ganji, Bahram Azizollah; Yeop Majlis, Burhanuddin; Rastegar, Saeed.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. p. 239-244 4770315.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ganji, BA, Yeop Majlis, B & Rastegar, S 2008, First resonance frequency and high sensitivity for MEMS acoustic sensors. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4770315, pp. 239-244, 2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008, Johor Bahru, Johor, 25/11/08. https://doi.org/10.1109/SMELEC.2008.4770315
Ganji BA, Yeop Majlis B, Rastegar S. First resonance frequency and high sensitivity for MEMS acoustic sensors. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. p. 239-244. 4770315 https://doi.org/10.1109/SMELEC.2008.4770315
Ganji, Bahram Azizollah ; Yeop Majlis, Burhanuddin ; Rastegar, Saeed. / First resonance frequency and high sensitivity for MEMS acoustic sensors. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2008. pp. 239-244
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