Finite element and system level analyses of piezoresistive microcantilever for biosensing applications

Badariah Bais, Rosminazuin Ab Rahim, Burhanuddin Yeop Majlis

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5 Citations (Scopus)

Abstract

A piezoresistive microcantilever biosensor has been designed and optimized using both finite element and system level analyses. Using the finite element method, simulations on the mechanical and piezoresistive behavior of the piezoresistive microcantilever biosensor were carried out. The effect of varying geometrical dimension of both cantilever and piezoresistor on deflection and sensitivity has been studied. A noise analysis has also been considered by investigating the temperature and voltage variations effects to the sensor response. Further analysis was carried out by extracting the finite element results to system level analysis in the circuit simulation environment. For this purpose, a Wheatstone bridge schematic was constructed in the circuit simulator to convert the piezoresistive signal into an output voltage response. With the combination of finite element and system level analyses, a piezoresistive microcantilever design and optimization has been realized through circuit simulation environment similar to the actual device at faster simulation time.

Original languageEnglish
Pages (from-to)1038-1046
Number of pages9
JournalAustralian Journal of Basic and Applied Sciences
Volume5
Issue number12
Publication statusPublished - Dec 2011

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Circuit simulation
Biosensors
Schematic diagrams
Electric potential
Simulators
Finite element method
Networks (circuits)
Sensors
Temperature

ASJC Scopus subject areas

  • General

Cite this

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