Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

In this work, a theoretical analysis on the magnetic force generation of micro-actuator driven by planar microcoil is reported. The actuator design is optimized to increase the magnetic force and flux density that is useful for mechanical membrane deformation of an actuator. Therefore, this work is focused on the design and simulation of actuator material and structure using a finite element analysis method. As the results, the obtained magnetic force of maximum 11.4 mN has been observed for the actuator design having coil geometry of width w = 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm with NdFeB as magnet material. Hence, the optimized design geometry of the coil can be used as reference for the fabrication of electromagnetic actuator for micropump application.

Original languageEnglish
Title of host publicationProceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics
Pages25-28
Number of pages4
DOIs
Publication statusPublished - 2013
Event2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013 - Langkawi
Duration: 25 Sep 201327 Sep 2013

Other

Other2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013
CityLangkawi
Period25/9/1327/9/13

Fingerprint

Microactuators
Actuators
Finite element method
Geometry
Magnets
Fluxes
Membranes
Fabrication

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Pawinanto, R. E., Yunas, J., Yeop Majlis, B., & Hamzah, A. A. (2013). Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump. In Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics (pp. 25-28). [6706464] https://doi.org/10.1109/RSM.2013.6706464

Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump. / Pawinanto, Roer Eka; Yunas, Jumril; Yeop Majlis, Burhanuddin; Hamzah, Azrul Azlan.

Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. p. 25-28 6706464.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pawinanto, RE, Yunas, J, Yeop Majlis, B & Hamzah, AA 2013, Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump. in Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics., 6706464, pp. 25-28, 2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013, Langkawi, 25/9/13. https://doi.org/10.1109/RSM.2013.6706464
Pawinanto RE, Yunas J, Yeop Majlis B, Hamzah AA. Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump. In Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. p. 25-28. 6706464 https://doi.org/10.1109/RSM.2013.6706464
Pawinanto, Roer Eka ; Yunas, Jumril ; Yeop Majlis, Burhanuddin ; Hamzah, Azrul Azlan. / Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump. Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. pp. 25-28
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