Finger beam geometrical behavior analysis of a non-crossing differential capacitive MEMS accelerometer

Agus Santoso Tamsir, Farizah Saharil, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The main objective of this work is to perform a feasibility study on the geometrical behavior of finger beam of a non-crossing differential capacitive accelerometer. The non-crossing differential capacitive accelerometer has an advantage as to the crossing differential capacitive type because of its linear sensitivity. This paper discusses the effect of a beam deflection in designing a MEMS accelerometer due to the acceleration and the reactive force. From the simulation, the optimum geometrical size found is 200μm finger length with width varies from 1.75um to 2.5μm.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages673-676
Number of pages4
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Accelerometers
MEMS

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Tamsir, A. S., Saharil, F., & Yeop Majlis, B. (2004). Finger beam geometrical behavior analysis of a non-crossing differential capacitive MEMS accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 673-676). [1620974]

Finger beam geometrical behavior analysis of a non-crossing differential capacitive MEMS accelerometer. / Tamsir, Agus Santoso; Saharil, Farizah; Yeop Majlis, Burhanuddin.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 673-676 1620974.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tamsir, AS, Saharil, F & Yeop Majlis, B 2004, Finger beam geometrical behavior analysis of a non-crossing differential capacitive MEMS accelerometer. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620974, pp. 673-676, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Tamsir AS, Saharil F, Yeop Majlis B. Finger beam geometrical behavior analysis of a non-crossing differential capacitive MEMS accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 673-676. 1620974
Tamsir, Agus Santoso ; Saharil, Farizah ; Yeop Majlis, Burhanuddin. / Finger beam geometrical behavior analysis of a non-crossing differential capacitive MEMS accelerometer. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 673-676
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