FEM analysis of wavelength effects in piezoelectric substrate

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we discussed simulation of several annular surface acoustic wave (A-SAW) devices using various wavelengths to identify its effects on the focusing properties and to analyze the propagation of Rayleigh waves in piezoelectric substrate. By choosing Y-cut Z propagating Lithium Niobate as the substrate and aluminum electrodes as the IDT, we modeled the A-SAW devices using Comsol Multiphysics. We used 8 pairs of annular electrodes with thickness of 1 μm with three different design's wavelength of 100 μm, 150 μm and 200 μm, respectively. To minimize the computational time in determining the optimum frequency i.e. resonant frequency of the device, only one pair of electrode for each design is simulated under eigenfrequency analysis in 2D piezoelectric (pzd) module. To understand the Rayleigh waves behavior, simulation of the whole device structure was done under frequency domain analysis in 2D-axisymmetric piezoelectric module. From the simulation results, it can be observed that SAW displacement profiles, electric potential field and operating frequency are significantly influenced by the wavelength. The formation of focused acoustic waves at the center of A-SAW device suits them in biosensing and microfluidic actuation applications that require detection or manipulation of localized variations.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages259-262
Number of pages4
ISBN (Print)9781479957606
DOIs
Publication statusPublished - 10 Oct 2014
Event11th IEEE International Conference on Semiconductor Electronics, ICSE 2014 - Kuala Lumpur
Duration: 27 Aug 201429 Aug 2014

Other

Other11th IEEE International Conference on Semiconductor Electronics, ICSE 2014
CityKuala Lumpur
Period27/8/1429/8/14

Fingerprint

Acoustic surface wave devices
Rayleigh waves
Finite element method
Wavelength
Electrodes
Substrates
Frequency domain analysis
Aluminum
Microfluidics
Natural frequencies
Lithium
Acoustic waves
Electric potential

Keywords

  • Comsol Mutiphysics
  • Lithium Niobate
  • Rayleigh wave
  • surface acoustic wave

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Abd Aziz, N., Bais, B., Buyong, M. R., Yeop Majlis, B., & Nordin, A. N. (2014). FEM analysis of wavelength effects in piezoelectric substrate. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 259-262). [6920846] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2014.6920846

FEM analysis of wavelength effects in piezoelectric substrate. / Abd Aziz, Norazreen; Bais, Badariah; Buyong, Muhamad Ramdzan; Yeop Majlis, Burhanuddin; Nordin, Anis Nurashikin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. p. 259-262 6920846.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abd Aziz, N, Bais, B, Buyong, MR, Yeop Majlis, B & Nordin, AN 2014, FEM analysis of wavelength effects in piezoelectric substrate. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 6920846, Institute of Electrical and Electronics Engineers Inc., pp. 259-262, 11th IEEE International Conference on Semiconductor Electronics, ICSE 2014, Kuala Lumpur, 27/8/14. https://doi.org/10.1109/SMELEC.2014.6920846
Abd Aziz N, Bais B, Buyong MR, Yeop Majlis B, Nordin AN. FEM analysis of wavelength effects in piezoelectric substrate. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc. 2014. p. 259-262. 6920846 https://doi.org/10.1109/SMELEC.2014.6920846
Abd Aziz, Norazreen ; Bais, Badariah ; Buyong, Muhamad Ramdzan ; Yeop Majlis, Burhanuddin ; Nordin, Anis Nurashikin. / FEM analysis of wavelength effects in piezoelectric substrate. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 259-262
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